SCOPUS 정보 검색 플랫폼 - 논문 보기

메뉴 건너뛰기

Applied Surface Science

Volumn 249, Issue 1-4, 2005, Pages 246-256

Diamond-like carbon coatings on microdrill using an ECR-CVD system

(2) Ueng, H Y a Guo, C T a

a NATIONAL SUN YAT SEN UNIVERSITY (Taiwan)

Author keywords

DLC; ECR; Microdrill; Raman

Indexed keywords

ADHESION; CARBON; DIAMONDS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RAMAN SPECTROSCOPY; TITANIUM; TITANIUM NITRIDE;

DIAMOND-LIKE CARBON (DLC); ELECTRON CYCLOTRON RESONANCE (ECR); MICRODRILL; RAMAN;

COATINGS;

EID: 21344464423 PISSN: 01694332 EISSN: None Source Type: Journal
DOI: 10.1016/j.apsusc.2004.12.031 Document Type: Article

Times cited : (38)

References (51)

1
- 0033212254
- M.S. Cheong, D.-W. Cho, and K.F. Ehmann Int. J. Machine Tools Manufacture 39 1999 1539
- (1999) Int. J. Machine Tools Manufacture , vol.39 , pp. 1539
- Cheong, M.S.¹ Cho, D.-W.² Ehmann, K.F.³

2
- 0942272814
- Strasbourg
- J.G. Anqus Proceedings of the EMRS Meeting Strasbourg 1987 179 (Les Editions de Physique, Paris, 1987)
- (1987) Proceedings of the EMRS Meeting , pp. 179
- Anqus, J.G.¹

3
- 0024754478
- O. Stenzel, B. Rau, and G. Schaarschmidt Phys. Solidi A 115 1989 247
- (1989) Phys. Solidi A , vol.115 , pp. 247
- Stenzel, O.¹ Rau, B.² Schaarschmidt, G.³

4
- 84955026624
- P. Reinke, W. Jacob, and W. Moller J. Vac. Sci. Technol. A 10 1992 434
- (1992) J. Vac. Sci. Technol. A , vol.10 , pp. 434
- Reinke, P.¹ Jacob, W.² Moller, W.³

5
- 0033377792
- B. Bhushan Diamond Relat. Mater. 8 1999 1985
- (1999) Diamond Relat. Mater. , vol.8 , pp. 1985
- Bhushan, B.¹

6
- 0031171986
- A.A. Voevodin, M.S. Donley, and J.S. Zabinski Surf. Coat. Technol. 92 1997 42
- (1997) Surf. Coat. Technol. , vol.92 , pp. 42
- Voevodin, A.A.¹ Donley, M.S.² Zabinski, J.S.³

7
- 0002272533
- S. Neuville, and A. Matthews MRS Bull. 22 1997 22
- (1997) MRS Bull. , vol.22 , pp. 22
- Neuville, S.¹ Matthews, A.²

8
- 0041740620
- J.J. Cuomo, J.P. Doyle, J. Bruley, and J.C. Liu Appl. Phys. Lett. 58 1991 1
- (1991) Appl. Phys. Lett. , vol.58 , pp. 1
- Cuomo, J.J.¹ Doyle, J.P.² Bruley, J.³ Liu, J.C.⁴

9
- 0026853341
- R. Wei, P.J. Wilbur, A. Erdemir, and F.M. Kustas Surf. Coat. Technol. 51 1992 139
- (1992) Surf. Coat. Technol. , vol.51 , pp. 139
- Wei, R.¹ Wilbur, P.J.² Erdemir, A.³ Kustas, F.M.⁴

10
- 0020194632
- C. Weissmantel, K. Bewilogua, K. Breuer, D. Dietrich, U. Ebers-bach, H.-J. Erier, B. Rau, and G. Reisse Thin Solid Films 96 1982 31
- (1982) Thin Solid Films , vol.96 , pp. 31
- Weissmantel, C.¹ Bewilogua, K.² Breuer, K.³ Dietrich, D.⁴ Ebers-Bach, U.⁵ Erier, H.-J.⁶ Rau, B.⁷ Reisse, G.⁸

11
- 0001193542
- K. Miyoshi, J.J. Pouch, and S.A. Alterovitz Mater. Sci. Forum 52-53 1989 645
- (1989) Mater. Sci. Forum , vol.52-53 , pp. 645
- Miyoshi, K.¹ Pouch, J.J.² Alterovitz, S.A.³

12
- 0003514995
- P.S. Andry, P.W. Patel, and W.J. Varhue J. Mater. Res. 11 1996 211
- (1996) J. Mater. Res. , vol.11 , pp. 211
- Andry, P.S.¹ Patel, P.W.² Varhue, W.J.³

13
- 0029378465
- H. Buchkremer-Hermanns, H. Ren, and H. Weiss Surf. Coat. Technol. 74-75 1995 215
- (1995) Surf. Coat. Technol. , vol.74-75 , pp. 215
- Buchkremer-Hermanns, H.¹ Ren, H.² Weiss, H.³

14
- 11644319544
- A. Rusli, S.F. Yoon, H. Yang, Q. Zhang, J. Ahn, and Y.L. Fu J. Vac. Sci. Technol. A 162 1998 572
- (1998) J. Vac. Sci. Technol. A , vol.162 , pp. 572
- Rusli, A.¹ Yoon, S.F.² Yang, H.³ Zhang, Q.⁴ Ahn, J.⁵ Fu, Y.L.⁶

15
- 0040572798
- A. Rusli, S.F. Yoon, H. Yang, J. Ahn, Q. Zhang, Y.S. Wu, and W.L. New J. Appl. Phys. 84 1998 5277
- (1998) J. Appl. Phys. , vol.84 , pp. 5277
- Rusli, A.¹ Yoon, S.F.² Yang, H.³ Ahn, J.⁴ Zhang, Q.⁵ Wu, Y.S.⁶ New, W.L.⁷

16
- 0031619872
- S.F. Yoon, H. Yang, A. Rusli, J. Ahn, and Q. Zhang Diamond Relat. Mater. 7 1998 70
- (1998) Diamond Relat. Mater. , vol.7 , pp. 70
- Yoon, S.F.¹ Yang, H.² Rusli, A.³ Ahn, J.⁴ Zhang, Q.⁵

17
- 0033509563
- M. Murakawa, T. Komori, S. Takeuchi, and K. Miyoshi Surf. Coat. Technol. 120-121 1999 646
- (1999) Surf. Coat. Technol. , vol.120-121 , pp. 646
- Murakawa, M.¹ Komori, T.² Takeuchi, S.³ Miyoshi, K.⁴

18
- 0035387564
- J.I. Oñate, M. Comin, I. Braceras, A. Garcia, J.L. Viviente, M. Brizuela, N. garagorri, J.L. peris, and J.I. Alava Surf. Coat. Technol. 142-144 2001 1056
- (2001) Surf. Coat. Technol. , vol.142-144 , pp. 1056
- Oñate, J.I.¹ Comin, M.² Braceras, I.³ Garcia, A.⁴ Viviente, J.L.⁵ Brizuela, M.⁶ Garagorri, N.⁷ Peris, J.L.⁸ Alava, J.I.⁹

19
- 0001417170
- A.H. Lettington Carbon 36 1998 555
- (1998) Carbon , vol.36 , pp. 555
- Lettington, A.H.¹

20
- 0027648625
- D.P. Monaghan, D.G. Teer, R.D. Arnell, I. Efeoglu, and W. Ahmed J. de Physique IV, Col. C3 1993 579
- (1993) J. De Physique , vol.43 , pp. 579
- Monaghan, D.P.¹ Teer, D.G.² Arnell, R.D.³ Efeoglu, I.⁴ Ahmed, W.⁵

21
- 58149324426
- J. Deng, and M. Braun Diamond Relat. Mater. 4 1995 936
- (1995) Diamond Relat. Mater. , vol.4 , pp. 936
- Deng, J.¹ Braun, M.²

22
- 0031120253
- A.A. Voevodin, M.A. Capano, S.J.P. Laube, M.S. Donley, and J.S. Zabinski Thin Solid Films 298 1997 107
- (1997) Thin Solid Films , vol.298 , pp. 107
- Voevodin, A.A.¹ Capano, M.A.² Laube, S.J.P.³ Donley, M.S.⁴ Zabinski, J.S.⁵

23
- 0000580728
- C. Dumkum, D.M. Grant, and I.R. McColl Diamond Relat. Mater. 6 1997 802
- (1997) Diamond Relat. Mater. , vol.6 , pp. 802
- Dumkum, C.¹ Grant, D.M.² McColl, I.R.³

24
- 0038130973
- T. Sato, K. Sugai, S. Ueda, K. Matsunami, and M. Yasuoka Surf. Coat. Technol. 169-170 2003 45
- (2003) Surf. Coat. Technol. , vol.169-170 , pp. 45
- Sato, T.¹ Sugai, K.² Ueda, S.³ Matsunami, K.⁴ Yasuoka, M.⁵

25
- 21344473206
- D. K-Heinz, and O. Daniel Int. J. Refract. Met. Hard Mater. 20 2002 121
- (2002) Int. J. Refract. Met. Hard Mater. , vol.20 , pp. 121
- K-Heinz, D.¹ Daniel, O.²

26
- 0029191095
- E. Aoyama, H. Inoue, T. Hirogaki, H. Nobe, Y. Kitahara, and T. Katayama Compos. Struct. 32 1995 567
- (1995) Compos. Struct. , vol.32 , pp. 567
- Aoyama, E.¹ Inoue, H.² Hirogaki, T.³ Nobe, H.⁴ Kitahara, Y.⁵ Katayama, T.⁶

27
- 0000774834
- K.W.R. Gilkes, S. Prawer, and K.W. Nugent J. Appl. Phys. 87 2000 7283
- (2000) J. Appl. Phys. , vol.87 , pp. 7283
- Gilkes, K.W.R.¹ Prawer, S.² Nugent, K.W.³

28
- 33750901188
- D.G. McCulloch, S. Prawer, and A. Hoffman Phys. Rev. B 50 1994 5905
- (1994) Phys. Rev. B , vol.50 , pp. 5905
- McCulloch, D.G.¹ Prawer, S.² Hoffman, A.³

29
- 36448998857
- D.G. McCulloch, and S. Prawer J. Appl. Phys. 78 1995 3040
- (1995) J. Appl. Phys. , vol.78 , pp. 3040
- McCulloch, D.G.¹ Prawer, S.²

30
- 0001510029
- S. Prawer, K.W. Nugent, Y. Lifshitz, G.D. Lempert, E. Grossman, J. Kulik, I. Avigal, and R. Kalish Diamond Relat. Mater. 5 1996 433
- (1996) Diamond Relat. Mater. , vol.5 , pp. 433
- Prawer, S.¹ Nugent, K.W.² Lifshitz, Y.³ Lempert, G.D.⁴ Grossman, E.⁵ Kulik, J.⁶ Avigal, I.⁷ Kalish, R.⁸

31
- 0042866089
- H. Nakazawa, T. Mikami, Y. Enta, M. Suemitsu, and M. Mashita Jpn. J. Appl. Phys. 42 2003 L676
- (2003) Jpn. J. Appl. Phys. , vol.42
- Nakazawa, H.¹ Mikami, T.² Enta, Y.³ Suemitsu, M.⁴ Mashita, M.⁵

32
- 0031619872
- S.F. Yoon, H. Yang, A. Rusli, J. Ahn, and Q. Zhang Diamond Relat. Mater. 7 1998 70
- (1998) Diamond Relat. Mater. , vol.7 , pp. 70
- Yoon, S.F.¹ Yang, H.² Rusli, A.³ Ahn, J.⁴ Zhang, Q.⁵

33
- 0033700673
- T. Sharda, T. Soga, T. Jimbo, and M. Umeno Diamond Relat. Mater. 9 2000 1331
- (2000) Diamond Relat. Mater. , vol.9 , pp. 1331
- Sharda, T.¹ Soga, T.² Jimbo, T.³ Umeno, M.⁴

34
- 0032142177
- S.F. Yoon, A. Rusli, J. Ahn, Q. Zhang, Y.S. Wu, and H. Yang Diamond Relat. Mater. 7 1998 1213
- (1998) Diamond Relat. Mater. , vol.7 , pp. 1213
- Yoon, S.F.¹ Rusli, A.² Ahn, J.³ Zhang, Q.⁴ Wu, Y.S.⁵ Yang, H.⁶

35
- 0028513408
- A. Tamor, and W.C. Vassel J. Appl. Phys. 76 1994 3823
- (1994) J. Appl. Phys. , vol.76 , pp. 3823
- Tamor, A.¹ Vassel, W.C.²

36
- 0036508145
- A.C. Ferrari Diamond Relat. Mater. 11 2002 1053
- (2002) Diamond Relat. Mater. , vol.11 , pp. 1053
- Ferrari, A.C.¹

37
- 0000251494
- M. Yoshikawa Mater. Sci. Forum 52 1989 365
- (1989) Mater. Sci. Forum , vol.52 , pp. 365
- Yoshikawa, M.¹

38
- 0242603790
- A.C. Ferrari, and J. Robertson Phys. Rev. B 61 2000 14095
- (2000) Phys. Rev. B , vol.61 , pp. 14095
- Ferrari, A.C.¹ Robertson, J.²

39
- 0025513272
- A. Grill IBM J. Res. Develop. 34 1990 849
- (1990) IBM J. Res. Develop. , vol.34 , pp. 849
- Grill, A.¹

40
- 0034652753
- K.L. Choy, and E. Felix Mater. Sci. Eng., A 278 2000 162
- (2000) Mater. Sci. Eng., A , vol.278 , pp. 162
- Choy, K.L.¹ Felix, E.²

41
- 0024680069
- A.H. Deutchman, and R.J. Partyka Adv. Mater. Proc. 6 1989 29
- (1989) Adv. Mater. Proc. , vol.6 , pp. 29
- Deutchman, A.H.¹ Partyka, R.J.²

42
- 0026839034
- M. Wang, K. Schmidt, K. Reichelt, H. Dimigen, and H. Hubsch J. Mater. Res. 7 1992 667
- (1992) J. Mater. Res. , vol.7 , pp. 667
- Wang, M.¹ Schmidt, K.² Reichelt, K.³ Dimigen, H.⁴ Hubsch, H.⁵

43
- 0942299747
- H.Y. Ueng, and C.T. Guo J. Vac. Sci. Technol. B 21 2003 2540
- (2003) J. Vac. Sci. Technol. B , vol.21 , pp. 2540
- Ueng, H.Y.¹ Guo, C.T.²

44
- 0040366627
- L. Frank Surf. Coat. Technol. 107 1998 191
- (1998) Surf. Coat. Technol. , vol.107 , pp. 191
- Frank, L.¹

45
- 0035802413
- E.O. Ezugwu, and C.I. Okeke J. Mater. Process. Technol. 116 2001 10
- (2001) J. Mater. Process. Technol. , vol.116 , pp. 10
- Ezugwu, E.O.¹ Okeke, C.I.²

46
- 0034117742
- J. Nickel, a.N. Shuaib, B.S. Yibas, and S.M. Nizam Wear 239 2000 155
- (2000) Wear , vol.239 , pp. 155
- Nickel, J.¹ Shuaib, A.N.² Yibas, B.S.³ Nizam, S.M.⁴

47
- 0345466634
- V. Derflinger, H. Brandle, and H. Zimmermann Surf. Coat. Technol. 113 1999 286
- (1999) Surf. Coat. Technol. , vol.113 , pp. 286
- Derflinger, V.¹ Brandle, H.² Zimmermann, H.³

48
- 0345634950
- W. Hockauf, H. Proll, R. bauerle, G. Eisenblatter, and W. Rehbein VDI Berichte 1375 1998 135
- (1998) VDI Berichte , vol.1375 , pp. 135
- Hockauf, W.¹ Proll, H.² Bauerle, R.³ Eisenblatter, G.⁴ Rehbein, W.⁵

49
- 21544437674
- U. Helmersson, S. Todorova, L.C. Markert, S.A. Barnett, J.E. Sundgern, and J.E. Geene J. Appl. Phys. 62 1987 481
- (1987) J. Appl. Phys. , vol.62 , pp. 481
- Helmersson, U.¹ Todorova, S.² Markert, L.C.³ Barnett, S.A.⁴ Sundgern, J.E.⁵ Geene, J.E.⁶

50
- 0345634950
- W. Hockauf, H. Pröll, R. Bäuerle, G. Eisenblätter, and W. Rehbein VDI Berichte 1375 1998 135
- (1998) VDI Berichte , vol.1375 , pp. 135
- Hockauf, W.¹ Pröll, H.² Bäuerle, R.³ Eisenblätter, G.⁴ Rehbein, W.⁵

51
- 21344454472
- Nanofilm Technologies International Pte. Ltd., Ayer Rajah Industrial Estate, Singapore, http://www.nanofilm.com.sg.

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.