Development of DLC film technology for electronic application

Diamond and Related Materials

Volumn 9, Issue 3, 2000, Pages 649-653

  Baranov, A M ^a   Varfolomeev, A E ^b   Nefedov, A A ^b   Anderle, M ^c   Calliari, L ^c   Speranza, G ^c   Landini, N ^c  

^a Res Institute of Vacuum Technique   (Russian Federation)

^b KURCHATOV INSTITUTE   (Russian Federation)

^c ITC IRST   (Italy)

Author keywords

[No Author keywords available]

Indexed keywords

DENSITY (SPECIFIC GRAVITY); ELECTRONIC STRUCTURE; GRAPHITE; MAGNETRON SPUTTERING; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SURFACE ROUGHNESS; X RAY PHOTOELECTRON SPECTROSCOPY;

DIAMOND-LIKE CARBON (DLC) FILMS; X RAY REFLECTIVITY;

AMORPHOUS FILMS;

EID: 0033729748     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0925-9635(99)00251-4     Document Type: Article

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