Selective etching of dislocations in violet-laser diode structures

Journal of Crystal Growth

Volumn 293, Issue 1, 2006, Pages 18-21

  Kamler, G ^a   Smalc, J ^b   Wozniak M ^b   Weyher, J L ^a,c   Czernecki, R ^d   Targowski, G ^a   Leszczynski M ^a,d   Grzegory, I ^a,d   Porowski, S ^a  

^a INSTITUTE OF HIGH PRESSURE PHYSICS   (Poland)

^b WARSAW UNIVERSITY OF TECHNOLOGY   (Poland)

^c RADBOUD UNIVERSITY NIJMEGEN   (Netherlands)

^d TOPGAN LTD   (Poland)

Author keywords

A1. Etching; A1. Linear defects; B1. Gallium nitride

Indexed keywords

DENSITY (SPECIFIC GRAVITY); DISLOCATIONS (CRYSTALS); ETCHING; GALLIUM NITRIDE; SEMICONDUCTOR QUANTUM WELLS;

DEFECT-SELECTIVE ETCHING; LASER DIODE STRUCTURES; LINEAR DEFECTS; LOWEST DISLOCATION DENSITY;

SEMICONDUCTOR LASERS;

EID: 33745959748     PISSN: 00220248     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.jcrysgro.2006.04.099     Document Type: Article

References (10)

1. Nakamura S. J. Crystal Growth 201-202 (1999) 290
2. Grzegory I. J. Phys. Condens. Matter 13 (2001) 6875
3. Weyher J.L., Macht L., Kamler G., Borysiuk J., and Grzegory I. Phys. Status Solidii (c) 3 (2003) 821
4. Ivanov V.Yu., Godlewski M., Teisseyre H., Perlin P., Czernecki R., Prystawko P., Leszczynski M., Grzegory I., Suski T., and Porowski S. Appl. Phys. Lett. 81 (2002) 3735
5. Prystawko P., Czernecki R., Gorczyca L., Targowski G., Wisniewski P., Perlin P., Zielinski M., Suski T., Leszczynski M., Grzegory I., and Porowski S. J. Crystal Growth 272 (2004) 274
6. Skierbiszewski C., Wasilewski Z.R., Siekacz M., Feduniewicz A., Perlin P., Wisniewski P., Borysiuk J., Grzegory I., Leszczynski M., Suski T., and Porowski S. Appl. Phys. Lett. 86 (2005) 011114
7. Weyher J.L., Brown P.D., Rouviere J.L., Wosinski T., Zauner A.R.A., and Grzegory I. J. Crystal Growth 210 (2000) 151
8. Weyher J.L., Albrecht M., Wosiński T., Nowak G., Strunk H.P., and Porowski S. Mater. Sci. Eng. B 80 (2001) 318
9. Kamler G., Borysiuk J., Weyher J.L., Presz A., Woźniak M., and Grzegory I. Eur. Phys. J. Appl. Phys. 27 (2004) 247
10. Kamler G., Weyher J.L., Grzegory I., Jezierska E., and Wosinski T. J. Crystal Growth 246 (2002) 21