SCOPUS 정보 검색 플랫폼

Applied Physics A: Materials Science and Processing

Volumn 78, Issue 5, 2004, Pages 681-685

On the stoichiometry condition for the formation of cubic boron nitride films

(2) Le, Y K a Oechsner, H a

a Rheinland Pfälzische Technische Universität Kaiserslautern Landau (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPRESSIVE STRESS; DEPOSITION; FOURIER TRANSFORM INFRARED SPECTROSCOPY; MAGNETRON SPUTTERING; NUCLEATION; STOICHIOMETRY; STRESS ANALYSIS;

DEPOSITED FILMS; RADIO FREQUENCY; REDUCED STRESS LEVELS; SECONDARY ION MASS SPECTROSCOPY;

CUBIC BORON NITRIDE;

EID: 18844429447 PISSN: 09478396 EISSN: None Source Type: Journal
DOI: 10.1007/s00339-003-2281-7 Document Type: Article

Times cited : (10)

References (20)

1
- 0031339504
- P.B. Mirkarimi, K.F. McCarty, D.L. Medlin: Mater. Sci. Eng. R 21, 47 (1997)
- (1997) Mater. Sci. Eng. R , vol.21 , pp. 47
- Mirkarimi, P.B.¹ McCarty, K.F.² Medlin, D.L.³

2
- 0041754964
- H. Saitoh, W.A. Yarbrough: Appl. Phys. Lett. 58, 2228 (1991)
- (1991) Appl. Phys. Lett. , vol.58 , pp. 2228
- Saitoh, H.¹ Yarbrough, W.A.²

3
- 36448999062
- D.J. Kester, R. Messier: J. Appl. Phys. 72, 504 (1992)
- (1992) J. Appl. Phys. , vol.72 , pp. 504
- Kester, D.J.¹ Messier, R.²

4
- 0029208056
- W. Dworschak, K. Jung, H. Ehrhardt: Thin Solid Films 254, 65 (1995)
- (1995) Thin Solid Films , vol.254 , pp. 65
- Dworschak, W.¹ Jung, K.² Ehrhardt, H.³

5
- 0037513511
- H. Hofsäss, H. Feldermann, M. Sebastian, C. Ronning: Phys. Rev. B 55, 13 230 (1997)
- (1997) Phys. Rev. B , vol.55 , pp. 13230
- Hofsäss, H.¹ Feldermann, H.² Sebastian, M.³ Ronning, C.⁴

6
- 3142552836
- W. Kulisch, S. Reinke: Diamond Film Technol. 7, 105 (1997)
- (1997) Diamond Film Technol. , vol.7 , pp. 105
- Kulisch, W.¹ Reinke, S.²

7
- 0010005593
- D.R. McKenzie, D. Muller, B.A. Pailthorpe: Phys. Rev. Lett. 67, 773 (1991)
- (1991) Phys. Rev. Lett. , vol.67 , pp. 773
- McKenzie, D.R.¹ Muller, D.² Pailthorpe, B.A.³

8
- 0033312489
- Y. Setsuhara, M. Kumagai, M. Suzuki, T. Suzuki, S. Miyake: Surf. Coat. Technol. 116-119, 100 (1999)
- (1999) Surf. Coat. Technol. , vol.116-119 , pp. 100
- Setsuhara, Y.¹ Kumagai, M.² Suzuki, M.³ Suzuki, T.⁴ Miyake, S.⁵

9
- 0027664920
- S. Nakano, O. Fukunaga: Diamond Relat. Mater. 2, 1409 (1993)
- (1993) Diamond Relat. Mater. , vol.2 , pp. 1409
- Nakano, S.¹ Fukunaga, O.²

10
- 0001793935
- V.L. Solozhenko: Diamond Relat. Mater. 4, 1 (1994)
- (1994) Diamond Relat. Mater. , vol.4 , pp. 1
- Solozhenko, V.L.¹

11
- 0003933757
- Springer, Berlin
- N.N. Ledentsov: Growth Process and Surface Phase Equilibria in Molecular Beam Epitaxy (Springer, Berlin 1999)
- (1999) Growth Process and Surface Phase Equilibria in Molecular Beam Epitaxy
- Ledentsov, N.N.¹

12
- 0032486045
- J. Ye, U. Rothhaar, H. Oechsner: Surf. Coat. Technol. 105, 159 (1998)
- (1998) Surf. Coat. Technol. , vol.105 , pp. 159
- Ye, J.¹ Rothhaar, U.² Oechsner, H.³

13
- 0003420793
- Physical Electronics Inc., Eden Prairie
- C.L. Hedberg (Ed.): Handbook of Auger Electron Spectroscopy (Physical Electronics Inc., Eden Prairie 1995)
- (1995) Handbook of Auger Electron Spectroscopy
- Hedberg, C.L.¹

14
- 0028413383
- H. Gnaser, H. Oechsner: Surf. Interface Anal. 21, 257 (1994)
- (1994) Surf. Interface Anal. , vol.21 , pp. 257
- Gnaser, H.¹ Oechsner, H.²

15
- 0032069494
- H. Chae, S.M. Park: Appl. Surf. Sci. 127-129, 304 (1998)
- (1998) Appl. Surf. Sci. , vol.127-129 , pp. 304
- Chae, H.¹ Park, S.M.²

16
- 0040121461
- W.G. Sainty, P.J. Martin, R.P. Netterfield, D.R. McKenzie, D.J.H. Cockayne, D.M. Dwarte: J. Appl. Phys. 64, 3980 (1988)
- (1988) J. Appl. Phys. , vol.64 , pp. 3980
- Sainty, W.G.¹ Martin, P.J.² Netterfield, R.P.³ McKenzie, D.R.⁴ Cockayne, D.J.H.⁵ Dwarte, D.M.⁶

17
- 0026850184
- D. Bouchier, W. Möller: Surf. Coat. Technol. 51, 190 (1992)
- (1992) Surf. Coat. Technol. , vol.51 , pp. 190
- Bouchier, D.¹ Möller, W.²

18
- 0038785719
- Y.K. Le, H. Oechsner: Thin Solid Films 437, 83 (2003)
- (2003) Thin Solid Films , vol.437 , pp. 83
- Le, Y.K.¹ Oechsner, H.²

19
- 21844489067
- D.J. Kester, K.S. Ailey, D.J. Lichtenwalner, R.F. Davis: J. Vac. Sci. Technol. A 12, 3074 (1994)
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 3074
- Kester, D.J.¹ Ailey, K.S.² Lichtenwalner, D.J.³ Davis, R.F.⁴

20
- 30244456854
- L.B. Hackenberger, L.J. Pilione, R. Messier, G.P. Lamaze: J. Vac. Sci. Technol. A 12, 1569 (1994)
- (1994) J. Vac. Sci. Technol. A , vol.12 , pp. 1569
- Hackenberger, L.B.¹ Pilione, L.J.² Messier, R.³ Lamaze, G.P.⁴

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.