Micromachined silicon deformable mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3353, Issue , 1998, Pages 896-901

  Mansell, Justin D ^a   Byer, Robert L ^a  

^a STANFORD UNIVERSITY   (United States)

Author keywords

Adaptive optics; Deformable mirror; Electrostatic actuation; Micromachined; Silicon mirror

Indexed keywords

CONTINUOUS SURFACES; CONTINUOUS WAVES; DEFORMABLE MIRROR; ELECTROSTATIC ACTUATION; HANDLING CAPACITIES; HIGH INTENSITIES; HIGH REFLECTIVITIES; MECHANICAL RESONANCES; MICROMACHINED; MICROMACHINED SILICONS; MODE-MATCHING; ND: YAG; OPTICAL QUALITIES; RADIUS OF CURVATURES; RING CAVITIES; SILICON MIRROR;

DAMPING; DEFORMATION; ELECTROSTATIC ACTUATORS; ELECTROSTATICS; LASER PULSES; NONMETALS; OPTICAL SYSTEMS; PHOTOLITHOGRAPHY; THICKNESS MEASUREMENT; ADAPTIVE OPTICS; LASER BEAMS; NEODYMIUM LASERS; SEMICONDUCTING SILICON; SINGLE CRYSTALS; WAVEFRONTS;

MIRRORS;

EID: 0032256699     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.321668     Document Type: Conference Paper

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