Miniature high-resolution imaging system with 3D MOEMS beam scanning for Mars exploration

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4178, Issue , 2000, Pages 90-97

  Dickensheets, David L ^a   Himmer, Phillip A ^a   Friholm, Robert A ^a   Lutzenberger, B Jeffrey ^a  

^a Montana State University   (United States)

Author keywords

Confocal microscope; Deformable membrane; Mems; Moems; Torsion mirror scanner

Indexed keywords

IMAGE RESOLUTION; MARTIAN SURFACE ANALYSIS; MICROMETERS; MIRRORS; SUBSTRATES; TORSIONAL STRESS;

CURVATURE CORRECTION; DYNAMIC FOCUS CONTROL; EXPERIMENTAL CHARACTERIZATION; HIGH-RESOLUTION IMAGING; MARS EXPLORATION; OPTICAL RESOLUTION; PARABOLIC MEMBRANES; RAMAN SPECTROMETERS;

SCANNING;

EID: 2142729235     PISSN: 0277786X     EISSN: 1996756X     Source Type: Conference Proceeding    
DOI: 10.1117/12.396518     Document Type: Conference Paper

References (6)

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4. David L. Dickensheets, Paul V. Ashcraft and Phillip A. Himmer, "Pixel-by-pixel aberration correction for scanned-beam micro-optical instruments, " SPIE 3878, 1999.
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