Novel microsystem applications with new techniques in LTCC

Proceedings - 2005 IMAPS/ACerS 1st International Conference and Exhibition on Ceramic Interconnect and Ceramic Microsystems Technologies, CICMT 2005

Volumn , Issue , 2005, Pages 156-173

  Peterson, K A ^a   Patel, K D ^a   Ho, C K ^a   Rohde, S B ^a   Nordquist, C D ^a   Walker, C A ^a   Wroblewski, B D ^a   Okandan, M ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

Channel; LTCC; Microfluidic; Microsystem; Sacrificial

Indexed keywords

CHANNEL; DEVELOPMENT AND TESTING; INTERMEDIATE PRESSURES; LOW TEMPERATURE CO FIRED CERAMIC(LTCC); LTCC; MICROSYSTEM APPLICATIONS; SACRIFICIAL; SILICON-BASED MEMS;

CERAMIC MATERIALS; EXHIBITIONS; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; MICROELECTRONICS; MICROFLUIDICS; SILICON; THICK FILMS;

MICROSYSTEMS;

EID: 33745770990     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

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