Optical dilatometer for insitu measurements of warpage effects during firing of LTCC multilayer structures

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4931, Issue , 2002, Pages 71-74

  Wagner, Matthias ^a   Roosen, Andreas ^a   Stiegelschmitt, Alfons ^a   Schwanke, Dieter ^b   Bechtold, Franz ^c  

^a UNIVERSITY OF ERLANGEN NUREMBERG   (Germany)

^b Micro Systems Engineering   (Germany)

^c VIA Electronic GmbH ^*  (Germany)

Author keywords

Distortion; Insitu measurement; LTCC; Multilayer; Optical dilatometer; Shrinkage behavior

Indexed keywords

ADHESIVE PASTES; CERAMIC MATERIALS; DEFORMATION; DILATOMETERS; MICROSCOPES; MULTILAYERS; PRESSURE EFFECTS; SHRINKAGE; TAPES; THERMAL EFFECTS;

LASER SCANNING MICROSCOPE; LOW TEMPERATURE COFIRED CERAMIC MULTILAYER STRUCTURE; OPTICAL DILATOMETER; WARPAGE EFFECTS;

CERAMIC PRODUCTS;

EID: 0036450212     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (7)

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