Meso-scale electro-magnetically actuated normally closed valve realized on LTCC tapes

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 3877, Issue , 1999, Pages 230-239

  Gongora Rubio, Mario ^a   Sola Laguna, Luis ^a   Smith, Michael ^a   Santiago Aviles, Jorge J ^a  

^a Instituto de Pesquisas Tecnologicas   (Brazil)

Author keywords

[No Author keywords available]

Indexed keywords

CERAMIC MATERIALS; ELECTROMAGNETS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROELECTRONICS; VALVES (MECHANICAL);

ELECTROMAGNETIC ACTUATORS; MICROFLUIDIC SYSTEMS; MICROVALVES;

FLUIDIC DEVICES;

EID: 0033314351     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (11)