Novel LTCC fabrication techniques applied to a rolled micro ion mobility spectrometer

Proceedings - Electrochemical Society

Volumn 27, Issue , 2003, Pages 156-171

  Peterson, K A ^a   Rohde, S B ^a   Pfeifer, K B ^a   Turner, T S ^a  

^a SANDIA NATIONAL LABORATORIES   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

GAS PLUMBING; LOW TEMPERATURE CO-FIRED CERAMICS (LTCC); MICRO SYSTEMS; ROBUST SENSING;

FABRICATION; HERMETIC DEVICES; MICROELECTRONICS; RESISTORS; ROBUSTNESS (CONTROL SYSTEMS); SPECTROMETERS;

CERAMIC MATERIALS;

EID: 21644450447     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (10)

1. S. Rohde and K. Peterson, Applying New LTCC/LIGA Construction Techniques in Realizing a Miniature Ion Mobility Spectrometer," IMAPS Advanced Technology Workshop on Packaging of MEMS and Related Micro Integrated Nano Systems, Denver, September 6-8, 2002.
2. Peterson, K. A. Rhode, S.B., Tuner, T. S., Casias, A.L., "Novel Structures in Ceramic Interconnect Technology", IMAPS Ceramic Interconnect Technology Conference, Denver, CO, April 7-9, 2003.
3. Peterson, K. A., Rohde, S. B., Pfeifer, K. B., Turner, T. S., "Novel LTCC Fabrication Techniques Applied to a rolled Ion Mobility Spectrometer," Abstract 1153, 204th Meeting of the Electrochemical Society, Orlando, Florida, October 12-16, 2003.
4. Eiceman, G. E.; Karpas, Z.; Ion Mobility Spectrometry, CRC Press, Boca Raton, FL, 1994, pp 57-66.
5. Plumlee, D.G, Tam, M, Dwivedi, P, Hill, H. H, Hartman, J. A, and Moll, A. J, "Ion Mobility Spectrometer Fabricated in LTCC", IMAPS Ceramic Interconnect Technology Conference, Denver, CO, April 7-9, 2003.
6. th Meeting of the Electrochemical Society, Orlando, Florida, October 12-16, 2003.
7. Pfeifer, K. B.; Sanchez, R. C.; International Journal of Ion Mobility Spectroscopy, 5 (2002) 3, 63-66.
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9. H.H. Bau, S.G.K. Ananthasuresh, J.J. Santiago-Aviles, J. Zhong, M. Kim, M. Yi, P. Espinoza-Vallejos, L. Sola-Labuna, "Ceramic tape-based meso systems technology," DSC-Vol. 66, Micro-Electro-Mechanical Systems (MEMS), 1998, ASME, PP. 491-498.
10. T. Merkel, M. Graeber, L. Pagel, "A new technology for fluidic microsystems based on PDB technology," Sensors and Actuators 77 (1999) 98-105.