Fabrication of PZT thin films with TiOx buffer layers by rf magnetron sputtering

Integrated Ferroelectrics

Volumn 80, Issue 1, 2006, Pages 281-288

  Zhong, Chaowei ^a   Peng, Jiagen ^a,b   Zhang, Shuren ^a   Zhang, Wangli ^a  

^a UNIVERSITY OF ELECTRONIC SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b RESEARCH CENTER OF LASER FUSION   (China)

Author keywords

Lead zirconate titanate; RF magnetron sputtering; Uncooled infrared focal plane detector arrays

Indexed keywords

ARRAYS; CERAMIC MATERIALS; INFRARED DETECTORS; LEAD COMPOUNDS; MAGNETRON SPUTTERING; MEASUREMENT THEORY; PERMITTIVITY; POLARIZATION;

LEAD ZIRCONATE TITANATE; LEAD ZIRCONATE TITANATE THIN FILMS; RF-MAGNETRON SPUTTERING; UNCOOLED INFRARED FOCAL PLANE DETECTOR ARRAYS;

THIN FILMS;

EID: 33745741426     PISSN: 10584587     EISSN: 16078489     Source Type: Conference Proceeding    
DOI: 10.1080/10584580600659829     Document Type: Article

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