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Volumn 79, Issue 1, 2001, Pages 86-89
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Orientation control and electrical properties of sputtered Pb(Zr,Ti)O3 films
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Author keywords
[No Author keywords available]
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Indexed keywords
CARRIER MOBILITY;
CRYSTAL ORIENTATION;
CRYSTALLOGRAPHY;
FILM PREPARATION;
LEAD COMPOUNDS;
MAGNETIC HYSTERESIS;
MAGNETRON SPUTTERING;
RAPID THERMAL ANNEALING;
REMANENCE;
SPUTTER DEPOSITION;
SUBSTRATES;
THIN FILMS;
ATOMIC MOBILITY;
FERROELECTRIC THIN FILMS;
DIELECTRIC FILMS;
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EID: 0035094526
PISSN: 09215107
EISSN: None
Source Type: Journal
DOI: 10.1016/S0921-5107(00)00555-9 Document Type: Article |
Times cited : (27)
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References (16)
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