Preparation and properties of lead-zirconate-titanate ferroelectric thin films using radio frequency planar magnetron sputtering

Journal of Applied Physics

Volumn 87, Issue 8, 2000, Pages 3931-3936

  Chang, C C ^a   Tang, C S ^a  

^a NATIONAL TAIWAN OCEAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0001326766     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.372437     Document Type: Article

References (18)

1. L. E. Sanchez, S.-Y. Wu, and I. K. Naik, Appl. Phys. Lett. 56, 2399 (1990).
2. R. Takayama, Y. Tomita, K. Iijima, and I. Ueda, Ferroelectrics 118, 325 (1991).
3. M. Okuyama, Y. Togami, and Y. Hamakawa, Sens. Actuators 16, 263 (1989).
4. M. Liu, P. Wang, G. Wu, and Y. Rao, Sens. Actuators A 35, 259 (1993).
5. R. Watton, Ferroelectrics 91, 87 (1987).
6. Y. Wada and R. Hayakawa, Jpn. J. Appl. Phys., Part 1 15, 2041 (1976).
7. T. Shiosak, Ultrason. Symp. Proc., IEEE 537 (1990).
8. R. Moazzami, C. Hu, and W. H. Shepherd, IEEE Trans. Electron Devices 39, 2044 (1992).
9. W. A. Geideman, IEEE Trans. Ultrason, Fenroelectr. Freq. Control 38, 704 (1991).
10. J. R. Choi, D. H. Lee, and S. M. Cho, Ferroelectrics 5, 119 (1994).
11. K. Sreenivas, M. Sayer, D. J. Baar, and M. Nishioka, Appl. Phys. Lett. 5, 709 (1988).
12. L. Wang, A. Pignolet, and F. Levy, Mater. Res. Bull. 25, 1495 (1990).
13. B. Krupanidhi, N. Maffei, M. Sayer, and K. El-ASSI, J. Appl. Phys. 54, 6601 (1983).
14. R. Takayama and Y. Tomita, J. Appl. Phys. 65, 1666 (1989).
15. C. Kittel, Introduction to Solid State Physics, 7th ed. (Wiley, New York, 1996), p. 391.
16. S. G. Porter, Ferroelectrics 33, 193 (1981).
17. B. Ploss and S. Bauer, Sens. Actuators A 25-27, 407 (1991).
18. R. W. Whatmore, Ferroelectrics 118, 241 (1991).