High-temperature LPP collector mirror

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Feigl, Torsten ^a   Yulin, Sergiy ^a   Benoit, Nicolas ^a   Kaiser, Norbert ^a   Böwering, Norbert R ^b   Ershov, Alex I ^b   Khodykin, Oleh V ^b   Viatella, John W ^b   Bruzzone, Kent A ^b   Fomenkov, Igor V ^b   Myers, David W ^b  

^a FRAUNHOFER INSTITUTE FOR APPLIED OPTICS AND PRECISION ENGINEERING   (Germany)

^b CYMER INC   (United States)

Author keywords

Collector mirror; Multilayer coatings; Optics lifetime; Thermal stability

Indexed keywords

ANNEALING; COATINGS; INTERDIFFUSION (SOLIDS); INTERFACES (MATERIALS); LITHOGRAPHY; MIRRORS; MOLYBDENUM; SILICON; SUBSTRATES; THERMAL EFFECTS; THERMODYNAMIC STABILITY;

COLLECTOR MIRRORS; MULTILAYER COATINGS; OPTICAL STABILITY; OPTICS LIFETIME;

LASER PRODUCED PLASMAS;

EID: 33745630637     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.662138     Document Type: Conference Paper

References (11)

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