LPP EUV source development for HVM

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 I, Issue , 2006, Pages

  Hansson, Björn A M ^a   Fomenkov, Igor V ^a   Böwering, Norbert R ^a   Ershov, Alex I ^a   Partlo, William N ^a   Myers, David W ^a   Khodykin, Oleh V ^a   Bykanov, Alexander N ^a   Rettig, Curtis L ^a   Huffman, Jerzy R ^a   Vargas, L Ernesto ^a   Simmons, Rod D ^a   Chavez, Juan A ^a   Marx, William F ^a   Brandt, David C ^a  

^a CYMER INC   (United States)

Author keywords

EUV lithography; EUV source; High Volume Manufacturing; Laser Produced Plasma

Indexed keywords

ENERGY CONSERVATION; LIGHT; LIGHT SOURCES; MEASUREMENTS; OPTICAL COATINGS; SCANNING;

EUV LITHOGRAPHY; EUV SOURCE; HIGH VOLUME MANUFACTURING; LASER PRODUCED PLASMA;

PLASMAS;

EID: 33745602732     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.656687     Document Type: Conference Paper

References (5)

1. D. W. Myers, I. V. Fomenkov, B. A. M. Hansson, B. C. Kiene, D. C. Brandt, in: Proc. of SPIE Vol. 5751, Emerging Lithographic Technologies IX, R. S. Mackay, Ed., 248-259 (2005).
2. Norbert R. Böwering, Alex I. Ershov, William F. Marx, Oleh V. Khodykin, Björn A. M. Hansson, Ernesto Vargas L., Juan A. Chavez, Igor V. Fomenkov, Dave W. Myers, David C. Brandt, "EUV Source Collector" In these Proceedings of SPIE Vol. 6151, Emerging Lithographic Technologies X, (2006)
3. Chiew-Seng Koay, Simi George, Kazutoshi Takenoshita, Robert Bernath, Etsuo Fujiwara, Martin Richardson, Vivek Bakshi Proc. SPIE Vol 5751 279-292 (2005)
4. Martin Richardson, Chiew-Seng Koay, Kazutoshi Takenoshita, Simi George, Tobias Schmid, Robert Bernath, Somsak Teerawattansook, Greg Shimkaveg, William T. Silfvast, "The Tin-Doped Droplet Laser Plasma Source - Meeting Roadmap Requirements" Proc. Int. Sematech EUVL Symposium, San Diego (2005).
5. Igor V. Fomenkov, Björn A.M. Hansson, Norbert R. Böwering, Alex I. Ershov, William N. Partlo, Vladimir B. Fleurov, Oleh V, Khodykin, Alexander N. Bykanov, Curds L. Rettig, Jerzy R. Huffman, Ernesto Vargas L., Juan A. Chavez, William F. Marx, David C. Brandt, "High Power Low Cost Drive Laser for LPP Source" In these Proceedings of SPIE Vol. 6151, Emerging Lithographic Technologies X, (2006)