Marching to the beat of Moore's law

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6152 I, Issue , 2006, Pages

  Borodovsky, Yan ^a  

^a INTEL CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

COST ACCOUNTING; DENSITY MEASUREMENT (SPECIFIC GRAVITY); LITHOGRAPHY; MOORING CABLES; SYNCHRONIZATION; DENSITY (SPECIFIC GRAVITY); EVOLUTIONARY ALGORITHMS; INTEGRATED CIRCUIT MANUFACTURE; PHOTOLITHOGRAPHY; RISK ASSESSMENT;

AREA DENSITY SCALING; DENSITY DOUBLING; MULTIPLE LITHOGRAPHY SOLUTIONS; TECHNOLOGY GENERATION NODES; INFRASTRUCTURE AVAILABILITY; LARGE-SCALE MANUFACTURING; REVOLUTIONARY - TECHNOLOGY; UNPREDICTABLE RISK;

INTEGRATED CIRCUITS;

EID: 33745610764     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.655176     Document Type: Conference Paper

References (23)

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