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Volumn 6152 I, Issue , 2006, Pages
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Three-dimensional metrology with side-wall measurement using tilt-scanning operation in digital probing AFM
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Author keywords
AFM; Atomic force microscopy; Carbon nano tube; Digital probing; Semiconductor surface; Sidewall measurement; Tilt scanning; Tilted tip
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Indexed keywords
CARBON NANOTUBES;
DIGITAL SIGNAL PROCESSING;
IMAGE ANALYSIS;
METRIC SYSTEM;
SURFACE ROUGHNESS;
DIGITAL PROBING;
SEMICONDUCTOR SURFACES;
SIDEWALL MEASUREMENT;
TILT-SCANNING;
TILTED-TIP;
ATOMIC FORCE MICROSCOPY;
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EID: 33745600349
PISSN: 0277786X
EISSN: None
Source Type: Conference Proceeding
DOI: 10.1117/12.654346 Document Type: Conference Paper |
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Times cited : (10)
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References (13)
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