Side-wall measurement using tilt-scanning method in Atomic Force Microscope

Digest of Papers - Microprocesses and Nanotechnology 2005: 2005 International Microprocesses and Nanotechnology Conference

Volumn 2005, Issue , 2005, Pages 64-65

  Murayama, Ken ^a   Gonda, Satoshi ^a   Koyanagi, Hajime ^a   Terasawa, Tsuneo ^a  

^a NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 33750689103     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/imnc.2005.203739     Document Type: Conference Paper

References (2)

1. H. Kado, S. Yamamoto, K. Yokoyama and T. Tohda, "Observation of contact holes by atomic microscopy with ZnO whisker tip", J. Appl. Phys. 74, 4354-4356(1993).
2. S. Hosaka, T. Morimoto, K. Murayama et al, "Proposal for new atomic force microscopy imaging for a high aspect structure", Microelectron. Eng. 57-58, 651-657(2001).