Characterization of CCD sensor for actinic mask blank inspection

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6151 II, Issue , 2006, Pages

  Tezuka, Yoshihiro ^a   Tanaka, Toshihiko ^a   Terasawa, Tsuneo ^a   Tomie, Toshihisa ^b  

^a ASSOCIATION OF SUPER ADVANCED ELECTRONICS TECHNOLOGIES ASET   (Japan)

^b NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Actinic inspection; BI CCD; EUV; Mask blanks; Point spread function; Readout noise

Indexed keywords

CHARGE COUPLED DEVICES; ELECTRIC POTENTIAL; IMAGE ANALYSIS; MASKS; MATHEMATICAL MODELS; OPTICAL TRANSFER FUNCTION; PHOTONS; ULTRAVIOLET RADIATION;

ACTINIC INSPECTION; BI-CCD; EUV; MASK BLANKS; READOUT NOISE;

SENSORS;

EID: 33745585305     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.655078     Document Type: Conference Paper

References (8)

1. T. Tomie, T. Terasawa. Y. Tezuka and M. Ito, "Concept of ultra-fast at-wavelength inspection of defects on a multilayer mask using a laser-produced plasma source", Proceedings of SPIE Vol. 5038, p41-48, 2003.
2. Y. Tezuka, M. Ito, T. Terasawa and T. Tomie, "Design and development of a novel actinic inspection tool for EUV multilayer-coated mask blanks", Proceedings of SPIE Vol. 5038, p866-877, 2003.
3. Y. Tezuka, M. Ito, T. Terasawa and T. Tomie, "Actinic detection of multilayer defects on EUV mask blanks using LPP light source and dark-field imaging", Proceedings of SPIE Vol. 5374, p271-280, 2004.
4. Y. Tezuka, M. Ito, T. Terasawa and T. Tomie, "Actinic Detection and Signal Characterization of Multilayer Defects on EUV Mask Blanks", Proceedings of SPIE Vol. 5567, p791-799, 2004.
5. E. M. Gullikson, E. Tejnil, K.-Y. Tsai, A. R. Stivers, H. Kusunose, "Modeling the defect inspection sensitivity of a confocal microscope", Proceedings of SPIE, Vol. 5751, p1223-1229, 2005.
6. Y. Tezuka, T. Tanaka, T. Terasawa and T. Tomie, "Sensitivity- limiting factors of at-wavelength EUVL mask blank inspection", to be published in Jpn. J. Appl. Phys., Vol.45, No.6B.
7. James R. Janesick: Scientific Charge-coupled Devices, SPIE Press (2001) p132.
8. Y. Tezuka, M. Ito, T. Terasawa and T. Tomie, "Actinic Detection and Screening of Multilayer Defects on EUV Mask Blanks using Dark-field Imaging", Proceedings of SPIE Vol. 5446, p870-879, 2004.