Understanding ion-milling damage in Hg 1-xCd xTe epilayers

Journal of Vacuum Science and Technology A: Vacuum, Surfaces and Films

Volumn 24, Issue 4, 2006, Pages 995-1000

  Wang, Changzhen ^a   Smith, David J ^a   Tobin, Steve ^b   Parodos, Themis ^b   Zhao, Jun ^c   Chang, Yong ^c   Sivananthan, Sivalingam ^c  

^a ARIZONA STATE UNIVERSITY   (United States)

^b BAE SYSTEMS   (United States)

^c UNIVERSITY OF ILLINOIS AT CHICAGO   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

EPILAYERS; ION-MILLING; LIQUID-PHASE EPITAXY;

CADMIUM; HETEROJUNCTIONS; IONS; MICROSTRUCTURE; MULTILAYERS; TRANSMISSION ELECTRON MICROSCOPY;

MERCURY (METAL);

EID: 33745482827     PISSN: 07342101     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.2207148     Document Type: Article

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