Passivation of oxygen-related donors in microcrystalline silicon by low temperature deposition

Applied Physics Letters

Volumn 78, Issue 16, 2001, Pages 2330-2332

  Nasuno, Y ^a   Kondo, M ^a   Matsuda, A ^a  

^a ELECTROTECHNICAL LABORATORY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0035896783     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1364657     Document Type: Article

References (15)

1. K. Yamamoto, M. Yoshimi, Y. Tawada, Y. Okamoto, and A. Nakajima, J. Non-Cryst. Solids 266-269, 1082 (2000).
2. K. Saito, M. Sano, K. Matzuda, T. Kondo, M. Higasikawa, and T. Kariya, in Proceedings of the 11th PVSEC (PVSEC, Hokkaido, 1999), p. 229.
3. H. Keppner, J. Meier, P. Torres, D. Fischer, and A. Shah, Appl. Phys. A: Mater. Sci. Process. 69, 169 (1999).
4. O. Vetterl, F. Finger, R. Carius, P. Hapke, L. Houhen, O. Kluth, A. Lambertz, A. Muck, B. Rech, and H. Wagner, Solar Energy Materials and Solar Cells 62, 97 (2000).
5. R. B. Bergmann, Appl. Phys. A: Mater. Sci. Process. 69, 187 (1999).
6. H. Tanaka, M. Koyama, K. Miyachi, Y. Ashida, Y. Ohashi, N. Fukuda, and A. Nitta, in Proceeding of the Fourth International PVSEC (PVSEC. New South Wales, 1989).
7. P. Torres, J. Meier, R. Fluckiger, U. Kroll, J. A. A. Selvan, H. Keppner, A. Shah, S. D. Littlewood, I. E. Kelly, and P. Giannoules, Appl. Phys. Lett. 69, 1373 (1996).
8. B. Rech, O. Kluth, S. Wieder, H. Siekmann, J. Muller, W. Reetz, O. Vetterl, D. Lundszien, A. Lambertz, F. Finger, and H. Wagner, in Proceedings of the 11th PVSEC (PVSEC, Hokkaido, 1999), p. 67.
9. L. Guo, M. Kondo, M. Fukawa, K. Saito, and A. Matsuda, Jpn. J. Appl. Phys., Part 2 37, L1116 (1998).
10. T. Kamei, T. Wada, and A. Matsuda, Appl. Phys. Lett. (in press).
11. T. Kamei, M. Kondo, and A. Matsuda, Jpn. J. Appl. Phys., Part 2 37, 265 (1998).
12. S. Yamasaki, J. Phys. (Paris) 42, C4 (1981).
13. T. Shimizu, H. Kidoh, A. Morimoto, and M. Kumeda, Jpn. J. Appl. Phys., Part 1 28, 586 (1989).
14. N. Wyrsch, L. Feitknecht, C. Droz, P. Torres, A. Shah, A. Poruba, and M. Vanecek, J. Non-Cryst. Solids 266-269, 1099 (2000).
15. H. Stiebig, T. Brammer, J. Zimmer, O. Vetterl, and H. Wagner, J. Non-Cryst. Solids 266-269, 1104 (2000).