Electrical conductivity improvement by iodine doping for diamond-like carbon thin-films deposited by microwave surface wave plasma CVD

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 645-648

  Omer, Ashraf M M ^a   Adhikari, Sudip ^a   Adhikary, Sunil ^a   Rusop, Mohamad ^b   Uchida, Hideo ^a   Soga, Tetsuo ^b   Umeno, Masayoshi ^a  

^a CHUBU UNIVERSITY   (Japan)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

Diamond like carbon; Electrical conductivity; Iodine doping; Microwave surface wave plasma CVD; Optical properties

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC CONDUCTIVITY; MICROWAVE DEVICES; QUARTZ; THIN FILMS; X RAY PHOTOELECTRON SPECTROSCOPY;

IODINE DOPING; MICROWAVE SURFACE WAVE PLASMA CVD; NIR SPECTROSCOPY;

DIAMOND LIKE CARBON FILMS;

EID: 33745283916     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.11.045     Document Type: Article

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