Bonding defects and optical band gaps of DLC films deposited by microwave surface-wave plasma CVD

Diamond and Related Materials

Volumn 14, Issue 11-12, 2005, Pages 1832-1834

  Adhikary, Sunil ^a   Tian, Xue M ^a   Adhikari, Sudip ^a   Omer, Ashraf M M ^a   Uchida, Hideo ^a   Umeno, Masayoshi ^a  

^a CHUBU UNIVERSITY   (Japan)

Author keywords

Defect density; DLC films; Microwave surface wave plasma CVD; Optical band gap

Indexed keywords

ANNEALING; ATOMIC FORCE MICROSCOPY; CHEMICAL VAPOR DEPOSITION; MICROWAVES; PARAMAGNETIC RESONANCE; RAMAN SPECTROSCOPY;

BONDING DEFECTS; DEFECT DENSITY; OPTICAL BAND GAP;

DIAMOND LIKE CARBON FILMS;

EID: 27744601033     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.08.030     Document Type: Conference Paper

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