Plasma 2D modeling and diagnostics of DLC deposition on PET

Diamond and Related Materials

Volumn 15, Issue 4-8, 2006, Pages 904-907

  Amanatides, E ^a   Gkotsis, P ^a   Syndrevelis, Ch ^a   Mataras, D ^a  

^a Plasma Technology Laboratory   (Greece)

Author keywords

Bias growth; Gas phase reactions; Plasma CVD; Reactor modelling

Indexed keywords

ELECTRIC POTENTIAL; HYDROGEN; IONS; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; SUBSTRATES;

BIAS GROWTH; GAS PHASE REACTIONS; PLASMA CVD; REACTOR MODELLING;

DIAMOND LIKE CARBON FILMS;

EID: 33745241354     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2005.11.031     Document Type: Article

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