Electrical and optical properties of CH4/H2 RF plasmas for diamond-like thin film deposition

Diamond and Related Materials

Volumn 14, Issue 3-7, 2005, Pages 292-295

  Amanatides, E ^a   Mataras, D ^a  

^a UNIVERSITY OF PATRAS   (Greece)

Author keywords

Amorphous hydrogenated carbon; Bias growth; Diamond like carbon; Optical emission

Indexed keywords

AMORPHOUS MATERIALS; CARBON; DIAMOND DEPOSITS; ELECTRIC POTENTIAL; ELECTRIC PROPERTIES; HYDROGEN; HYDROGENATION; ION BOMBARDMENT; METHANE; OPTICAL PROPERTIES; PLASMA APPLICATIONS; THIN FILMS;

AMORPHOUS HYDROGENATED CARBON; BIAS GROWTH; DIAMOND-LIKE CARBON (DLC); OPTICAL EMISSION;

DIAMOND LIKE CARBON FILMS;

EID: 18444372655     PISSN: 09259635     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.diamond.2004.11.008     Document Type: Conference Paper

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