Laser ablation based technique for flexible fabrication of microlenses in polymer materials

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4426, Issue , 2002, Pages 124-127

  Naessens, Kris ^a   Van Daele, Peter ^a   Baets, Roel ^a  

^a GHENT UNIVERSITY   (Belgium)

Author keywords

Lacser ablation; Microlenses; Microstructures

Indexed keywords

EXCIMER LASERS; MICROLENSES; MICROSTRUCTURE; OPTOELECTRONIC DEVICES; PARAMETER ESTIMATION; POLYMERS; SURFACE ROUGHNESS; SURFACE TREATMENT;

MICRO-OPTICAL COMPONENTS;

LASER ABLATION;

EID: 0036384539     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.456880     Document Type: Conference Paper

References (5)

1. X. Wang, J.R. Leger and R.H. Prediker, "Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation", Appl. Opt. Vol. 36 No. 20, p4660-4665, 1997.
2. R. Matz, H. Weber, G. Weimann, "Laser-induced dry etching of integrated InP microlenses", Appl. Phys. A Vol. 65, p349-353, 1997.
3. Stephen Mihailov and Sylvain Lazare, "Fabrication of refractive microlens arrays by excimer laser ablation of amorphous Teflon", Appl. Opt. Vol. 32 No. 31, p6211-6218, 1993.
4. 2 laser", Appl. Opt. Vol. 37 No. 4, p627-631, 1998.
5. F. Beinhorn, J. Ihalemann, K. Luther, J. Troe, "Microlens arrays generated by UV laser irradiation of doped PMMA", Applied Physics A, Vol. 68 No. 6, p709-713.