Characterization of a polymer microlens fabricated by use of the hydrophobic effect

Optics Letters

Volumn 25, Issue 13, 2000, Pages 975-977

  Hartmann, Daniel M ^a   Kibar, Osman ^a   Esener, Sadik C ^a  

^a UNIVERSITY OF CALIFORNIA   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

HYDROPHOBIC EFFECT;

ABERRATIONS; HYDROPHOBICITY; LITHOGRAPHY; SUBSTRATES;

MICROLENSES;

EID: 0001640493     PISSN: 01469592     EISSN: None     Source Type: Journal    
DOI: 10.1364/OL.25.000975     Document Type: Article

References (7)

1. W. R. Cox, D. J. Hayes, T. Chen, and D. W. Ussery, Proc. SPIE 2383, 110 (1995).
2. M. Kurner and S. Kurner, Micro-optics and Lithography (VUB, Brussels, 1997), pp. 81-118.
3. S. Sinzinger and J. Jahns, Microoptics (Wiley, New York, 1999), Chap. 4, pp. 85-104.
4. E. Kim and G. M. Whitesides, Chem. Mater. 7, 1257 (1995).
5. J. L. Wilbur, A. Kurmar, H. Biebuyck, E. Kim, and G. M. Whitesides, Nanotechnology 7, 452 (1996).
6. H. Biebuyck and G. M. Whitesides, Langmuir 10, 2790 (1994).
7. S. Amai, Japanese patent 04261501 A2 920917.