Octamethylcyclotetrasiloxane-based, low-permittivity organosilicate coatings

Journal of the Electrochemical Society

Volumn 153, Issue 7, 2006, Pages

  Lin, Youbo ^a,c   Tsui, Ting Y ^b   Vlassak, Joost J ^a  

^a HARVARD UNIVERSITY   (United States)

^b TEXAS INSTRUMENTS   (United States)

^c ELECTROCHEMICAL SOCIETY   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONIC POLARIZABILITY; OCTAMETHYLCYCLOTETRASILOXANE; ORGANOSILICATE COATINGS; ORIENTATION POLARIZABILITIES;

COMPOSITION; CONCENTRATION (PROCESS); FOURIER TRANSFORM INFRARED SPECTROSCOPY; GLASS; PERMITTIVITY; PLASMA ENHANCED CHEMICAL VAPOR DEPOSITION; RUTHERFORD BACKSCATTERING SPECTROSCOPY; SILICON COMPOUNDS;

COATINGS;

EID: 33744790926     PISSN: 00134651     EISSN: None     Source Type: Journal    
DOI: 10.1149/1.2202120     Document Type: Article

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