SCOPUS 정보 검색 플랫폼

Microelectronic Engineering

Volumn 48, Issue 1, 1999, Pages 231-234

Ion beam synthesis of narrow Ge nanocluster bands in thin SiO2 films

(7) Von Borany, J a Heinig, K H a Grotzschel R a Klimenkov, M a Strobel, M a Stegemann, K H b Thees, H J b

a INSTITUTE OF ION BEAM PHYSICS AND MATERIALS RESEARCH (Germany)

b Zentrum Mikroelektronik Dresden GmbH (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; INTERFACES (MATERIALS); ION BOMBARDMENT; ION IMPLANTATION; NANOSTRUCTURED MATERIALS; SEMICONDUCTING GERMANIUM; SEMICONDUCTING SILICON COMPOUNDS; SEMICONDUCTOR DEVICE MODELS; SEMICONDUCTOR GROWTH; SILICA; SYNTHESIS (CHEMICAL); THIN FILMS;

ION BEAM SYNTHESIS; NANOCLUSTER BANDS;

SEMICONDUCTING FILMS;

EID: 0033190151 PISSN: 01679317 EISSN: None Source Type: Journal
DOI: 10.1016/S0167-9317(99)00377-9 Document Type: Article

Times cited : (26)

References (10)

1
- 0000108790
- S. Tiwari, F. Rana, K. Chan, L. Shi, H. Hanafi, Appl. Phys. Lett. 69 (1996) 1232.
- (1996) Appl. Phys. Lett. , vol.69 , pp. 1232
- Tiwari, S.¹ Rana, F.² Chan, K.³ Shi, L.⁴ Hanafi, H.⁵

2
- 0002917959
- Hamamatsu
- A. Kohno, H. Marakami, M. Ikeda, S. Miyazaki, M. Hirose, Ext. Abstract of the Intern. Conf. on Solid State Devices and Materials (Hamamatsu 1997), 566
- (1997) Ext. Abstract of the Intern. Conf. on Solid State Devices and Materials , pp. 566
- Kohno, A.¹ Marakami, H.² Ikeda, M.³ Miyazaki, S.⁴ Hirose, M.⁵

3
- 0032157520
- H. Seifarth, R. Grötzschel, A. Markwitz, W. Matz, P. Nitzsche, L. Rebohle, Thin Solid Films 330 (1998) 202
- (1998) Thin Solid Films , vol.330 , pp. 202
- Seifarth, H.¹ Grötzschel, R.² Markwitz, A.³ Matz, W.⁴ Nitzsche, P.⁵ Rebohle, L.⁶

4
- 0028272743
- H.A. Atwater, K.V. Shcheglov, S.S. Wong, K.J. Vahala, R.C. Flagan, M.L. Brongersma, A. Polman, Mat. Res. Soc. Symp. Proc. 316 (1994) 409
- (1994) Mat. Res. Soc. Symp. Proc. , vol.316 , pp. 409
- Atwater, H.A.¹ Shcheglov, K.V.² Wong, S.S.³ Vahala, K.J.⁴ Flagan, R.C.⁵ Brongersma, M.L.⁶ Polman, A.⁷

5
- 0008538288
- P. Normand, D. Tsoukalas, E. Kapetanakis, J.A. van den Berg, D.G. Armour, J. Stoemenos, Microelectr. Engineering. 16 (1997) 79
- (1997) Microelectr. Engineering , vol.16 , pp. 79
- Normand, P.¹ Tsoukalas, D.² Kapetanakis, E.³ Van Den Berg, J.A.⁴ Armour, D.G.⁵ Stoemenos, J.⁶

6
- 0033513861
- K.H. Heinig, B. Schmidt, A. Markwitz, R. Grötzschel, M. Strobel, S. Oswald, Nucl. Instr. Meth. B148 (1999) 969
- (1999) Nucl. Instr. Meth. , vol.B148 , pp. 969
- Heinig, K.H.¹ Schmidt, B.² Markwitz, A.³ Grötzschel, R.⁴ Strobel, M.⁵ Oswald, S.⁶

7
- 0000380639
- A. Nakajima, T. Futatsugi, H. Nakao, T. Usuki, N. Horiguchi, N. Yokayama, J. Appl. Phys. 84 (3) (1998) 1316
- (1998) J. Appl. Phys. , vol.84 , Issue.3 , pp. 1316
- Nakajima, A.¹ Futatsugi, T.² Nakao, H.³ Usuki, T.⁴ Horiguchi, N.⁵ Yokayama, N.⁶

8
- 0032741314
- A. Markwitz, L. Rebohle, H. Hofmeister, W. Skorupa, Nucl. Instr. Meth. B147 (1999) 361
- (1999) Nucl. Instr. Meth. , vol.B147 , pp. 361
- Markwitz, A.¹ Rebohle, L.² Hofmeister, H.³ Skorupa, W.⁴

9
- 85031579937
- unpublished
- V. Klimenkov, K.-H. Heinig, unpublished
- Klimenkov, V.¹ Heinig, K.-H.²

10
- 0032740257
- M. Strobel, K.-H. Heinig, W. Möller, A. Meldrum, D.S. Zhou, C.W. White, R.A. Zuhr, Nucl. Instr. Meth. B147 (1999) 343
- (1999) Nucl. Instr. Meth. , vol.B147 , pp. 343
- Strobel, M.¹ Heinig, K.-H.² Möller, W.³ Meldrum, A.⁴ Zhou, D.S.⁵ White, C.W.⁶ Zuhr, R.A.⁷

* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.