A TiNiCu thin film micropump made by magnetron Co-sputtered method

Materials Transactions

Volumn 47, Issue 3, 2006, Pages 532-535

  Zhang, H J ^a   Qiu, C J ^a  

^a HEILONGJIANG UNIVERSITY   (China)

Author keywords

Magnetron sputtering; Micropump; Patterning; Thin film; TiNiCu SMA (shape memory alloys); Valve

Indexed keywords

DIAPHRAGMS; DIELECTRIC MATERIALS; FATIGUE OF MATERIALS; MAGNETIC HYSTERESIS; MAGNETIC THIN FILM DEVICES; MAGNETRON SPUTTERING; MORPHOLOGY; SHAPE MEMORY EFFECT;

MICROPUMP; PATTERNING; SILICON MEMBRANE; TINICU SMA (SHAPE MEMORY ALLOYS); VALVE;

TITANIUM ALLOYS;

EID: 33646835775     PISSN: 13459678     EISSN: None     Source Type: Journal    
DOI: 10.2320/matertrans.47.532     Document Type: Article

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