Composition control of r.f.-sputtered Ti50Ni40Cu10 thin films using optical emission spectroscopy

Thin Solid Films

Volumn 365, Issue 1, 2000, Pages 61-66

  Wu, S K ^a   Chen, Y S ^a   Chen, J Z ^a  

^a NATIONAL TAIWAN UNIVERSITY   (Taiwan)

Author keywords

[No Author keywords available]

Indexed keywords

COMPOSITION EFFECTS; EMISSION SPECTROSCOPY; FERROMAGNETISM; MAGNETRON SPUTTERING; SHAPE MEMORY EFFECT; SPUTTER DEPOSITION; THIN FILMS; TITANIUM ALLOYS;

COMPOSITION CONTROL;

METALLIC FILMS;

EID: 0033894034     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(00)00657-X     Document Type: Article

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