Monte Carlo simulation study of electron interaction with solids and surfaces

Surface and Interface Analysis

Volumn 38, Issue 4, 2006, Pages 657-663

  Ding, Z J ^a,e   Salma, K ^a   Li, H M ^a   Zhang, Z M ^a   Tokesi, K ^b   Varga, D ^b   Toth, J ^b   Goto, K ^c   Shimizu, R ^d  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b INSTITUTE OF EXPERIMENTAL MEDICINE   (Hungary)

^c NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^d OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

^e UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

Author keywords

Backscattered electrons; Inelastic scattering; Monte Carlo simulation; REELS; Secondary electrons; Surface excitation

Indexed keywords

BACKSCATTERING; COMPUTER SIMULATION; DIELECTRIC DEVICES; ELASTICITY; ELECTRON SCATTERING; ELECTRON SPECTROSCOPY; MONTE CARLO METHODS;

BACKSCATTERED ELECTRONS; INELASTIC SCATTERING; REFLECTION ELECTRON ENERGY LOSS SPECTROSCOPY (REELS); SECONDARY ELECTRONS; SURFACE EXCITATION;

HIGH ENERGY PHYSICS;

EID: 33646569992     PISSN: 01422421     EISSN: 10969918     Source Type: Journal    
DOI: 10.1002/sia.2166     Document Type: Conference Paper

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