Energy spectra of backscattered electrons in auger electron spectroscopy: Comparison of monte carlo simulations with experiment

Journal of Applied Physics

Volumn 96, Issue 8, 2004, Pages 4598-4606

  Ding, Z J ^a   Li, H M ^a   Goto, K ^b   Jiang, Y Z ^b   Shimizu, R ^c  

^a UNIVERSITY OF SCIENCE AND TECHNOLOGY OF CHINA   (China)

^b NAGOYA INSTITUTE OF TECHNOLOGY   (Japan)

^c OSAKA INSTITUTE OF TECHNOLOGY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

AUGER ELECTRON SPECTROSCOPY; COMPUTER SIMULATION; ELECTRON SCATTERING; ELECTRONS; MONTE CARLO METHODS; SPECTRUM ANALYSIS;

BACKSCATTERED ELECTRONS; DIELECTRIC FUNCTIONS; ELASTIC SCATTERING; ENERGY SPECTRA;

BACKSCATTERING;

EID: 7544250686     PISSN: 00218979     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1791752     Document Type: Article

References (28)

1. K. Goto, N. Sakakibara, and Y. Sakai, Microbeam Anal, 2, 123 (1993).
2. K. Goto, N. Sakakibara, Y. Takeichi, Y. Numata, and Y. Sakai, Surf. Interface Anal. 22, 75 (1994).
3. K. Goto and Y. Takeichi, J. Vac. Sci. Technol. A 14, 1408 (1996).
4. Y. Takaichi and K. Goto, Surf. Interface Anal. 25, 17 (1997).
5. Use of Monte Carlo Calculations in Electron Probe Microanalysis and Scanning Electron Microscopy, edited by K. F. J. Heinrich, D. E. Newbury. and H. Yakowitz (NBS, Washington D.C., 1976), Vol. 460.
6. Electron Beam Interaction with Solids for Microscopy, Microanalysis and Microlithography, edited by D. F. Kyser, H. Niedrig, D. E. Newbury, and R. Shimizu (SEM Inc., AMF O'Hare, 1984).
7. R. Shimizu and Z. J. Ding, Rep. Prog. Phys. 55, 487 (1992).
8. Z. J. Ding, T. Nagatomi, R. Shimizu, and K. Goto, Surf. Sci. 336, 397 (1995).
9. Z. J. Ding and R Shimizu, Scanning 18, 92 (1996).
10. Z. J. Ding, Phys. Rev. B 55, 9999 (1997).
11. Z. J. Ding, J. Phys.: Condens. Matter 10, 1733 (1998); 10, 1753 (1998) .
12. Z. J. Ding, J. Phys.: Condens. Matter 10, 1733 (1998); 10, 1753 (1998) .
13. Z. J. Ding and R. Shimizu, Phys. Rev. B 61, 14128 (2000).
14. Z. J. Ding, H. M. Li, Q. R. Pu, Z. M. Thang, and R. Shimizu, Phys. Rev. B 66, 085411 (2002).
15. Z. J. Ding, X. D. Tang, and R. Shimizu, J. Appl. Phys. 89, 718 (2001).
16. D. R. Penn, Phys. Rev. B 35, 482 (1987).
17. Handbook of Optical Constants of Solids, edited by E. D. Palik (Academic, Orlando, 1985).
18. J.-P. Ganachand and M. Cailler, Surf. Sci. 83, 498 (1979).
19. A. Dubus, J.-C. Dehaes, J.-P. Gaaachaud, A. Hafni and M. Cailler, Phys. Rev. B 47, 11056 (1993).
20. C. Cohen-Tannoudji, B. Din, and F. Laloe, Quantum Mechanics (Hermann, Paris, 1977).
21. N. N. Rahman, K. Goto and R. Shimizu, J. Surf. Anal. 8, 2 (2001).
22. K. Goto, Y. Z. Jiang, N. N. Rahman, Y. Asano, and R. Shimizn, Surf. Interfece Anal. 34, 211 (2002).
23. Z. J. Ding, X. D. Tang, and H. M. Li, Int. J. Mod. Phys. B 16, 4405 (2002).
24. B. Gruzza, C. Robert, L. Bideux, and J. M. Guglielmacci, Microelectron. J. 30, 625 (1999).
25. Z. J. Ding, H. M. Li, and R. Shimizu, Appl. Phys. A: Mater. Sci. Process. 78, 585 (2004).
26. H. E. Bishop, in Electron Beam Interactions with Solids for Microscopy, Microanalysis & Microlithography, edited by D. F. Kyser, H. Niedrig, D. E. Newbury, and R. Shimizu (SEM Inc., AMF O'Hare, 1984), p. 259.
27. M. P. Seah and L S. Gilmore, Surf. Interface Anal. 26, 723 (1998).
28. J. P. Langeron, J. Microsc. Spectrosc. Electron. 13, 331 (1988).