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Volumn 88, Issue 18, 2006, Pages

Direct epitaxial growth of semiconducting β-FeSi2 thin films on Si(111) by facing targets direct-current sputtering

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; EPITAXIAL GROWTH; IRON COMPOUNDS; SINGLE CRYSTALS; SPUTTERING; SURFACE ROUGHNESS;

ENERGETIC NEUTRAL ATOMS; FACING TARGETS DIRECT-CURRENT SPUTTERING (FTDCS); OPTICAL BAND GAPS; TEMPERATURE DEPENDENCE;

THIN FILMS;

EID: 33646518848 PISSN: 00036951 EISSN: None Source Type: Journal
DOI: 10.1063/1.2200153 Document Type: Article

Times cited : (53)

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