메뉴 건너뛰기




Volumn 415, Issue 2-3, 2006, Pages 469-498

MST MEMS model order reduction: Requirements and benchmarks

Author keywords

Benchmark; Compact modeling; Electro thermal simulation; Electrostatic actuation; Mechanical beam; MEMS; Model order reduction; MST

Indexed keywords

COMPUTER SIMULATION; ELECTROSTATICS; MATHEMATICAL MODELS; MECHANICAL PROPERTIES; NATURAL FREQUENCIES;

EID: 33646140115     PISSN: 00243795     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.laa.2005.04.002     Document Type: Article
Times cited : (32)

References (63)
  • 1
    • 0036533129 scopus 로고    scopus 로고
    • A critical review of thermal models for electro-thermal simulation
    • d'Alessandro V., and Rinaldi N. A critical review of thermal models for electro-thermal simulation. Solid-State Electron. 46 4 (2002) 487-496
    • (2002) Solid-State Electron. , vol.46 , Issue.4 , pp. 487-496
    • d'Alessandro, V.1    Rinaldi, N.2
  • 2
    • 33646163577 scopus 로고    scopus 로고
    • Ansys, Inc., Ansys theory reference. Available from: .
  • 3
    • 4544371785 scopus 로고    scopus 로고
    • Approximation of large-scale dynamical systems: an overview
    • Antoulas A.C., and Sorensen D.C. Approximation of large-scale dynamical systems: an overview. Appl. Math. Comput. Sci. 11 5 (2001) 1093-1121
    • (2001) Appl. Math. Comput. Sci. , vol.11 , Issue.5 , pp. 1093-1121
    • Antoulas, A.C.1    Sorensen, D.C.2
  • 4
    • 0010011201 scopus 로고    scopus 로고
    • A survey of model reduction methods for large-scale systems
    • Antoulas A.C., Sorensen D.C., and Gugercin S. A survey of model reduction methods for large-scale systems. Contemp. Math. 280 (2001) 193-219
    • (2001) Contemp. Math. , vol.280 , pp. 193-219
    • Antoulas, A.C.1    Sorensen, D.C.2    Gugercin, S.3
  • 5
    • 0033723292 scopus 로고    scopus 로고
    • A new compact physical submicron mosfet model for circuit simulation
    • Ati A.A., Napieralska M., Napieralski A., and Ciota Z. A new compact physical submicron mosfet model for circuit simulation. Microelectron. Eng. 51 2 (2000) 373-392
    • (2000) Microelectron. Eng. , vol.51 , Issue.2 , pp. 373-392
    • Ati, A.A.1    Napieralska, M.2    Napieralski, A.3    Ciota, Z.4
  • 7
    • 33646162786 scopus 로고    scopus 로고
    • J.M. Badía, P. Benner, R. Mayo, E.S. Quintana-Ortí, Parallel algorithms for balanced truncation model reduction of sparse systems, in: Proceedings of the Workshop on State-of-the-Art in Scientific Computing PARA'04, Lyngby, Denmark, June 20-23, 2004, Lecture Notes in Computer Science, Springer, to appear.
  • 8
    • 0036776433 scopus 로고    scopus 로고
    • Krylov subspace techniques for reduced-order modeling of large-scale dynamical systems
    • Bai Z.J. Krylov subspace techniques for reduced-order modeling of large-scale dynamical systems. Appl. Numer. Math. 43 (2002) 9-44
    • (2002) Appl. Numer. Math. , vol.43 , pp. 9-44
    • Bai, Z.J.1
  • 9
    • 0033078749 scopus 로고    scopus 로고
    • Error bound for reduced system model by Padé approximation via the Lanczos process
    • Bai Z.J., Slone R.D., and Smith W.T. Error bound for reduced system model by Padé approximation via the Lanczos process. IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. 18 2 (1999) 133-141
    • (1999) IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. , vol.18 , Issue.2 , pp. 133-141
    • Bai, Z.J.1    Slone, R.D.2    Smith, W.T.3
  • 11
    • 33646135221 scopus 로고    scopus 로고
    • J. Bartholomeyczik, P. Ruther, A. Buhmann, K. Steffen, O. Paul, Novel low temperature soi-based fabrication process for high frequency microelectromechanical resonators, in: Proc. Eurosensors XVII, Guimaraes, Portugal, 2003, pp. 779-782.
  • 12
    • 2342490774 scopus 로고    scopus 로고
    • Automatic generation of compact electro-thermal models for semiconductor devices
    • Bechtold T., Rudnyi E.B., and Korvink J.G. Automatic generation of compact electro-thermal models for semiconductor devices. IEICE Trans. Electron. E86C (2003) 459-465
    • (2003) IEICE Trans. Electron. , vol.E86C , pp. 459-465
    • Bechtold, T.1    Rudnyi, E.B.2    Korvink, J.G.3
  • 13
    • 0242406989 scopus 로고    scopus 로고
    • State-space truncation methods for parallel model reduction of large-scale systems
    • Benner P., Quintana-Ortí E.S., and Quintana-Ortí G. State-space truncation methods for parallel model reduction of large-scale systems. Parallel Comput. 29 (2003) 1701-1722
    • (2003) Parallel Comput. , vol.29 , pp. 1701-1722
    • Benner, P.1    Quintana-Ortí, E.S.2    Quintana-Ortí, G.3
  • 14
    • 33646144596 scopus 로고    scopus 로고
    • R.F. Boisvert, R. Pozo, K.A. Remington, The matrix market exchange formats: initial design, National Institute of Standards and Technology, NIST Interim Report 5935, December 1996. Available from .
  • 15
    • 33646151764 scopus 로고    scopus 로고
    • Standardizing compact models for IC simulation
    • Brooks B. Standardizing compact models for IC simulation. IEEE Circ. Dev. (1999) 10-13. Available from: .
    • (1999) IEEE Circ. Dev. , pp. 10-13
    • Brooks, B.1
  • 16
    • 18144383249 scopus 로고
    • A.C. network analyzer study of the Schrödinger equation
    • Carter G.K., and Kron G. A.C. network analyzer study of the Schrödinger equation. Phys. Rev. 67 1 (1945) 44-49
    • (1945) Phys. Rev. , vol.67 , Issue.1 , pp. 44-49
    • Carter, G.K.1    Kron, G.2
  • 21
    • 85007654799 scopus 로고
    • Coupling of substructures for dynamic analysis
    • Craig Jr. R.R., and Bampton M.C.C. Coupling of substructures for dynamic analysis. AIAA Journal 6 7 (1968) 1313-1319
    • (1968) AIAA Journal , vol.6 , Issue.7 , pp. 1313-1319
    • Craig Jr., R.R.1    Bampton, M.C.C.2
  • 22
    • 33646140258 scopus 로고    scopus 로고
    • Z. Cui, Standardization of microsystem design and modelling, standardization for microsystems: the way forward, in: Proc. for the Int. Seminar MEMSTAND, NPL, UK, Barcelona, 2003, pp. 55-61.
  • 23
    • 2542503566 scopus 로고    scopus 로고
    • A multiparameter moment-matching model-reduction approach for generating geometrically parametrized interconnect performance models
    • Daniel L., Siong O.C., Chay L.S., Lee K.H., and White J. A multiparameter moment-matching model-reduction approach for generating geometrically parametrized interconnect performance models. IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. 23 5 (2004) 678-693
    • (2004) IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. , vol.23 , Issue.5 , pp. 678-693
    • Daniel, L.1    Siong, O.C.2    Chay, L.S.3    Lee, K.H.4    White, J.5
  • 24
    • 0033879027 scopus 로고    scopus 로고
    • MOS transistor modeling for RF IC design
    • Enz C.C., and Cheng Y.H. MOS transistor modeling for RF IC design. IEEE J. Solid-State Circ. 35 (2000) 186-201
    • (2000) IEEE J. Solid-State Circ. , vol.35 , pp. 186-201
    • Enz, C.C.1    Cheng, Y.H.2
  • 25
    • 0000658386 scopus 로고    scopus 로고
    • Reduced-order modeling techniques based on Krylov subspaces and their use in circuit simulation
    • Datta B. (Ed), Birkhauser, Boston, MA (Chapter 9).
    • Freund R.W. Reduced-order modeling techniques based on Krylov subspaces and their use in circuit simulation. In: Datta B. (Ed). Applied and Computational Control, Signals, and Circuits vol. 1 (1999), Birkhauser, Boston, MA 435-498 (Chapter 9).
    • (1999) Applied and Computational Control, Signals, and Circuits , vol.1 , pp. 435-498
    • Freund, R.W.1
  • 26
    • 0034322885 scopus 로고    scopus 로고
    • Krylov-subspace methods for reduced-order modeling in circuit simulation
    • Freund R.W. Krylov-subspace methods for reduced-order modeling in circuit simulation. J. Comput. Appl. Math. 123 (2000) 395-421
    • (2000) J. Comput. Appl. Math. , vol.123 , pp. 395-421
    • Freund, R.W.1
  • 27
    • 13844273168 scopus 로고    scopus 로고
    • Model reduction methods based on Krylov subspaces
    • Freund R.W. Model reduction methods based on Krylov subspaces. Acta Numerica 12 (2003) 267-319
    • (2003) Acta Numerica , vol.12 , pp. 267-319
    • Freund, R.W.1
  • 28
    • 0004195833 scopus 로고    scopus 로고
    • Gad-el-Hak M. (Ed), CRC Press, Boca Raton
    • In: Gad-el-Hak M. (Ed). The MEMS Handbook (2002.), CRC Press, Boca Raton
    • (2002) The MEMS Handbook
  • 30
    • 0742321743 scopus 로고    scopus 로고
    • Passive parameterized time-domain macromodels for high-speed transmission-line networks
    • Gunupudi P.K., Khazaka R., Nakhla M.S., Smy T., and Celo D. Passive parameterized time-domain macromodels for high-speed transmission-line networks. IEEE Trans. Microwave Theory Tech. 51 12 (2003) 2347-2354
    • (2003) IEEE Trans. Microwave Theory Tech. , vol.51 , Issue.12 , pp. 2347-2354
    • Gunupudi, P.K.1    Khazaka, R.2    Nakhla, M.S.3    Smy, T.4    Celo, D.5
  • 32
    • 27544471678 scopus 로고    scopus 로고
    • CMOS single chip gas detection systems-Part II
    • Hagleitner C., Hierlemann A., and Baltes H. CMOS single chip gas detection systems-Part II. Sensors Update 12 (2003) 51-120
    • (2003) Sensors Update , vol.12 , pp. 51-120
    • Hagleitner, C.1    Hierlemann, A.2    Baltes, H.3
  • 34
    • 33646130534 scopus 로고    scopus 로고
    • IMTEK Simulation, Benchmark website, , 2004.
  • 35
    • 33646134527 scopus 로고    scopus 로고
    • IMTEK Simulation, Model Order Reduction website, , 2004.
  • 39
    • 0346505677 scopus 로고
    • Electric circuit models of the Schrödinger equation
    • Kron G. Electric circuit models of the Schrödinger equation. Phys. Rev. 67 1 (1945) 39-43
    • (1945) Phys. Rev. , vol.67 , Issue.1 , pp. 39-43
    • Kron, G.1
  • 41
    • 0037287244 scopus 로고    scopus 로고
    • Low rank solution of Lyapunov equations
    • Li J.R., and White J. Low rank solution of Lyapunov equations. SIAM J. Matrix Anal. Appl. 24 1 (2002) 260-280
    • (2002) SIAM J. Matrix Anal. Appl. , vol.24 , Issue.1 , pp. 260-280
    • Li, J.R.1    White, J.2
  • 43
    • 33646147718 scopus 로고    scopus 로고
    • Matlab, Version 6.5. Available from: .
  • 46
    • 0034314512 scopus 로고    scopus 로고
    • Thermal issues in microsystems packaging
    • Nakayama W. Thermal issues in microsystems packaging. IEEE Trans. Adv. Pack. 23 (2000) 602-607
    • (2000) IEEE Trans. Adv. Pack. , vol.23 , pp. 602-607
    • Nakayama, W.1
  • 48
    • 0033295674 scopus 로고    scopus 로고
    • A cyclic low-rank Smith method for large sparse Lyapunov equations
    • Penzl T. A cyclic low-rank Smith method for large sparse Lyapunov equations. SIAM J. Sci. Comput. 21 (2000) 1401-1418
    • (2000) SIAM J. Sci. Comput. , vol.21 , pp. 1401-1418
    • Penzl, T.1
  • 49
    • 0032210755 scopus 로고    scopus 로고
    • Model reduction in linear heat conduction: use of interface fluxes for the numerical coupling
    • Petit D., and Hachette R. Model reduction in linear heat conduction: use of interface fluxes for the numerical coupling. Int. J. Heat Mass Transfer 41 21 (1998) 3177-3189
    • (1998) Int. J. Heat Mass Transfer , vol.41 , Issue.21 , pp. 3177-3189
    • Petit, D.1    Hachette, R.2
  • 50
    • 0037322204 scopus 로고    scopus 로고
    • Projection-based approaches for model reduction of weakly nonlinear, time-varying systems
    • Phillips J.R. Projection-based approaches for model reduction of weakly nonlinear, time-varying systems. IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. 22 (2003) 171-187
    • (2003) IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. , vol.22 , pp. 171-187
    • Phillips, J.R.1
  • 51
    • 0037322638 scopus 로고    scopus 로고
    • A trajectory piecewise-linear approach to model order reduction and fast simulation of nonlinear circuits and micromachined devices
    • Rewienski M., and White J. A trajectory piecewise-linear approach to model order reduction and fast simulation of nonlinear circuits and micromachined devices. IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. 22 (2003) 155-170
    • (2003) IEEE Trans. Comput. Aided Des. Integr. Circ. Syst. , vol.22 , pp. 155-170
    • Rewienski, M.1    White, J.2
  • 52
    • 6344234166 scopus 로고    scopus 로고
    • Micropropulsion for space-a survey of MEMS-based micro-thrusters and their solid propellant technology
    • Rossi C. Micropropulsion for space-a survey of MEMS-based micro-thrusters and their solid propellant technology. Sensors Update 10 (2002) 257-292
    • (2002) Sensors Update , vol.10 , pp. 257-292
    • Rossi, C.1
  • 53
    • 3142705953 scopus 로고    scopus 로고
    • Automatic model reduction for transient simulation of MEMS-based devices
    • Rudnyi E.B., and Korvink J.G. Automatic model reduction for transient simulation of MEMS-based devices. Sensors Update 11 (2002) 3-33
    • (2002) Sensors Update , vol.11 , pp. 3-33
    • Rudnyi, E.B.1    Korvink, J.G.2
  • 54
    • 85088345008 scopus 로고    scopus 로고
    • E.B. Rudnyi, T. Bechtold, J.G. Korvink, C. Rossi, Solid propellant microthruster: theory of operation and modelling, in: Nanotech 2002-At the Edge of Revolution, Houston, USA, 2002, AIAA paper 2002-5755.
  • 55
    • 6344294769 scopus 로고    scopus 로고
    • E.B. Rudnyi, J. Lienemann, A. Greiner, J.G. Korvink, mor4ansys: Generating compact models directly from ANSYS models, in: Technical Proc. of the 2004 Nanotechnology Conf. and Trade Show Nanotech 2004, vol. 2, Bosten, MA, USA, 2004, pp. 279-282. Available from: .
  • 57
    • 0037336473 scopus 로고    scopus 로고
    • Efficient model reduction of large scale systems using Krylov-subspace iterative methods
    • Sidi-Ali-Cherif S., and Grigoriadis K.M. Efficient model reduction of large scale systems using Krylov-subspace iterative methods. Int. J. Eng. Sci. 41 (2003) 507-520
    • (2003) Int. J. Eng. Sci. , vol.41 , pp. 507-520
    • Sidi-Ali-Cherif, S.1    Grigoriadis, K.M.2
  • 58
    • 0005510059 scopus 로고    scopus 로고
    • Dynamics and control of electrostatic structures
    • Silverberg L., and Weaver Jr. L. Dynamics and control of electrostatic structures. J. Appl. Mech. 63 (1996) 383-391
    • (1996) J. Appl. Mech. , vol.63 , pp. 383-391
    • Silverberg, L.1    Weaver Jr., L.2
  • 61
    • 33646156310 scopus 로고    scopus 로고
    • Texas Instruments, Digital light processing (DLP). Available from: .
  • 62
    • 0041971256 scopus 로고    scopus 로고
    • A framework for macromodeling and mixed-mode simulation of circuits/interconnects and electromagnetic radiations
    • Watanabe T., and Asai H. A framework for macromodeling and mixed-mode simulation of circuits/interconnects and electromagnetic radiations. IEICE Trans. Fund. Electron. Commun. Comput. Sci. 41 (2003) 507-520
    • (2003) IEICE Trans. Fund. Electron. Commun. Comput. Sci. , vol.41 , pp. 507-520
    • Watanabe, T.1    Asai, H.2


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.