MEMS and NEMS simulation

MEMS: A Practical Guide of Design, Analysis, and Applications

Volumn , Issue , 2006, Pages 93-186

  Korvink, Jan G ^a   Rudnyi, Evgenii B ^a   Greiner, Andreas ^a   Liu, Zhenyu ^a  

^a UNIVERSITY OF FREIBURG   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 84892340782     PISSN: None     EISSN: None     Source Type: Book    
DOI: 10.1007/978-3-540-33655-6_3     Document Type: Chapter

References (80)

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