Effect of porous silicon formation on stiction in surface micromachined MEMS structures

Physica Status Solidi (A) Applications and Materials Science

Volumn 202, Issue 8, 2005, Pages 1482-1486

  Bhattacharya, Enakshi ^a   Rani, Helen Anitha ^a   Babu, U Venu ^a   Rao, P R S ^a   Bhat, K N ^a   Martin, J ^b  

^a INDIAN INSTITUTE OF TECHNOLOGY MADRAS   (India)

^b ANALOG DEVICES INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MEMS; SURFACE MICROMACHINING; SURFACE PROFILERS;

ACCELEROMETERS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; POLYSILICON; STICTION; SURFACE ROUGHNESS;

POROUS SILICON;

EID: 25444530901     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200461149     Document Type: Conference Paper

References (14)

1. N. Tas, T. Sonnenberg, H. Jansen, R. Letenberg, and M. Elwenspoek, J. Micromech. Microeng. 6, 385 (1996).
2. R. Maboudian and R. Howe, J. Vac. Sci. Technol. B 15, 1 (1997).
3. M. P. de Boer and T. A. Michalske, J. Appl. Phys. 86, 817 (1999).
4. R. L. Alley, G. J. Cuan, R. T. Howe, and K. Komvopoulos, Proc. IEEE Solid-State Sensores and Actuators Workshop (Hilton Head Island, SC, USA, 1992), p. 202.
5. R. Legtenberg, H. A. C. Tilmans, J. Elders, and M. Elwenspoek, Sens. Actuators A 41-43, 230 (1994).
6. J. R. Martin and Y. Zhao, US patent no. 5694740 (1997).
7. J. R. Martin, US patent no. 6140674 (2004).
8. R. L. Alley, P. Mai, K. Komvopoulos, and R. T. Howe, in: Proc. 7th Int. Conf. on Solid-State Sensors and Actuators, Transducers '93 (Yokohama, 1993), p. 288.
9. Y. Matsumoto, T. Shimada, and M. Ishhida, Sens. Actuators A 72, 153 (1999).
10. Porous Silicon - Science and Technology, Proc. Winter School (Les Houches, February, 1994).
11. T. George, M. S. Anderson, W. T. Pike, T. L. Lin, and R. W. Fathauer, Appl. Phys. Lett. 60, 2359 (1992).
12. E. Bhattacharya, U. Venu Babu, L. H. Anitha Rani, P. Pradeep, P. R. S. Rao, and K. N. Bhat, in: Proceedings of ISSS-SPIE 2002, International Conference on Smart Materials, Structures and Systems (Indian Institute of Science, Bangalore, India, December 12-14, 2002), p. 317.
13. E. Bhattacharya, J. Kuang, M. Judy, and J. Martin, Proc. XI Intl Workshop on Physics of Semiconductor Devices (Delhi, December 2001), p. 485.
14. Proc. of the SPIE Symposium on Device and Process Technologies for MEMS and Microelectronics II, (Adelaide, Australia, 17-19 December, 2001), Proc. SPIE 4592, 252 (2001).