Silicon single-electron transistor fabricated by anisotropic etch and oxidation

Microelectronic Engineering

Volumn 83, Issue 4-9 SPEC. ISS., 2006, Pages 1710-1713

  Pennelli, G ^a   Piotto, M ^b   Barillaro, G ^a  

^a UNIVERSITY OF PISA   (Italy)

^b CNR   (Italy)

Author keywords

Anisotropic etching; Electron beam lithography; single electron transistor (SET)

Indexed keywords

ANISOTROPY; ELECTRON BEAM LITHOGRAPHY; ELECTRONS; ETCHING; OXIDATION; SILICON ON INSULATOR TECHNOLOGY;

ANISOTROPIC ETCHING; SILICON ISLE; SINGLE-ELECTRON TRANSISTOR (SET);

TRANSISTORS;

EID: 33646047145     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2006.01.144     Document Type: Article

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