The history and potential of maskless e-beam lithography

Microlithography World

Volumn 14, Issue 1, 2005, Pages

  Pfeiffer, Hans C ^a  

^a HCP Consulting   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON DEVICES; ELECTRONICS INDUSTRY; ELECTROOPTICAL DEVICES; HISTORY; SEMICONDUCTOR DEVICE MANUFACTURE; TECHNOLOGY;

DIRECT WRITE TECHNOLOGY; IBM (CO); MASKLESS LITHOGRPAHY;

ELECTRON BEAM LITHOGRAPHY;

EID: 15044338702     PISSN: 1074407X     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Article

References (14)

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