A planar unimorph-based actuator with large vertical displacement capability. Part I: Experiment

IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control

Volumn 45, Issue 5, 1998, Pages 1145-1150

  Glumac, Daniel E ^a   Robbins, William P ^a  

^a University of Minnesota   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINUM; COPPER; ELECTRIC POTENTIAL; ELECTRODES; LEAD COMPOUNDS; MATHEMATICAL MODELS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRIC DEVICES; PIEZOELECTRIC MATERIALS;

LEAD ZIRCONATE TITANATE; PIEZOELECTRIC ACTUATOR; PLANAR ACTUATOR GEOMETRY; UNIMORPH ELEMENTS;

ACTUATORS;

EID: 0032155564     PISSN: 08853010     EISSN: None     Source Type: Journal    
DOI: 10.1109/58.726437     Document Type: Article

References (7)

1. Y. Sugawara. K. Onitsuka, S. Ysohikawa, Q. Xu, R. E. Newnham, and K. Uchino, Metal-ceramic composite actuators,'' J. Amer, Ceramic Soc., vol. 75, no. 4, pp. 996-998, 1992.
2. A. Dogan, K. Uchino, and R. Fi. Newuharn, Composite piezoelectric transducer with truncated conical endcaps 'cymbal', IEEE Trans. Ultrason., Ferroelect., Freq. Contr., vol. 44. no. 3, pp. 597-605, 1997.
3. W. P. Robbins, D. L. Polla, and U. K. Glumac, High displacement piezoelectric actuator utilizing a meander line geometry. Part I: Experimental characterization, IEEE Trans. Ultrason., Perroelect., Freq. Contr., Sep. 1991.
4. W. P. Robbi.ns, High displacement piezoelectric actuator utilizing a meander line geometry. Part II: Theory,'' IEEE Trans. Ultrason., Ferroelect., Preq, Contr., Sep. 1991.
5. W. P. Robbins and D. E. Glumac, A planar unimorph-based actuator with large vertical displacement capability. Pari, II: Theory, WEE Trans. Ultrason., Ferroelect, Freq. Contr., vol. 45, no. 5, pp. 1151-1160, 1998.
6. The Piezo Book. Fishers, NY: Burleigh Instruments, Inc.
7. [7J J. G. Smits and A. Ballato, Dynamic admittance matrix of piezoelectric cantilever bimorphs, J. hfir.roelpr.tromech. Syst., vol. 3, pp. 105-112, Sep. 1994.