Investigation of femtosecond laser irradiation on fused silica

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 6108, Issue , 2006, Pages

  Bellouard, Yves ^a   Colomb, Tristan ^b   Depeursinge, Christian ^b   Said, Ali A ^c   Dugan, Mark ^c   Bado, Philippe ^c  

^a EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^b EPFL   (Switzerland)

^c TRANSLUME INC   (United States)

Author keywords

Etching selectivity; Femtosecond laser; Fused silica

Indexed keywords

BIREFRINGENCE; ETCHING; HOLOGRAPHY; LASER BEAM EFFECTS; PHOTONIC PROPULSION; REFRACTION; SCANNING ELECTRON MICROSCOPY; STRESS ANALYSIS;

CHEMICALLY ETCHED SPECIMENS; ETCHING SELECTIVITY; FEMTOSECOND LASERS; HOLOGRAPHY-BASED BIREFRINGENCE;

FUSED SILICA;

EID: 33645961295     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.648389     Document Type: Conference Paper

References (16)

1. K. M. Davis, K. Miura, N. Sugimoto, K. Hirao, Optics Letters 21, 1729 (1996).
2. A. Marcinkevicius, S. Juodkazis, M. Watanabe, M. Miwa, S. Matsuo, H. Misawa, J. Nishii, Optics Letters 26, 277-279 (2001).
3. Y. Bellouard, A. A. Said, and P. Bado, Opt. Express 13, 6635-6644 (2005).
4. Y. Bellouard, A. Said, M. Dugan, P. Bado, MRS Proceeding, vol 850, MM5.1.1. (2004).
5. V.R. Bardwaj, P.B. Corkum, D.M. Rayner, C. Hnatovky, E. Simova, R.S. Taylor, Optics Letters 29, 1312-1314 (2004).
6. Y. Bellouard, A. Said, M. Dugan, P. Bado, Optics Express 12, 2120-2129 (2004).
7. W.C. Oliver, G. M. Phar, J. Mater. Res., 19, 3-20 (2004).
8. K. Awazu, H. Kawazoe, J. Appl. Physics 94, 6243-6262 (2003).
9. F. L. Galeener, Solid State Commun. 44, 1037-1040 (1982).
10. C. Fiori, R.A.B. Devine, Phys. Rev. B 33, 2972-2974 (1986).
11. Y. Ikuta, K. Kajihara, M. Hirano, H. Hosono, Appl. Opt. 43, 2332-2336 (2004).
12. K. Awazu, J. Non. Cryst. Solids 337, 241-253 (2004).
13. X.R. Zhang, X. Xu, A.M. Rubenchik, Appl. Phys. A 79, 945-948 (2004).
14. V.R. Bardwaj, P.B. Corkum, D.M. Rayner, C. Hnatovky, E. Simova, R.S. Taylor, Optics Letters 29, 1312-1314 (2004).
15. T. Colomb, PhD Dissertation, no 3455, Ecole Polytechnique Fédérale de Lausanne (EPFL), 2006
16. T. Colomb, F. Dürr, E. Cuche, P. Marquet, H. Limberger, R.-P. Salathé, and C. Depeursinge, Appl. Opt. 44, 4461-4469 (2005).