Development of a strong field helicon plasma source

Review of Scientific Instruments

Volumn 77, Issue 3, 2006, Pages

  Shinohara, Shunjiro ^a   Mizokoshi, Hiroshi ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNAS; MAGNETIC FIELDS; PLASMA DENSITY; PLASMAS; QUARTZ;

DOUBLE LOOP ANTENNA; FILL PRESSURES; HELICON PLASMA; QUARTZ TUBE;

HELICONS;

EID: 33645800204     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2173940     Document Type: Article

References (29)

1. R. W. Boswell, Phys. Lett. 33A, 457 (1970).
2. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
3. S. Shinohara, Jpn. J. Appl. Phys., Part 1 36, 4695 (1997), and references therein.
4. R. W. Boswell and F. F. Chen, IEEE Trans. Plasma Sci. 25, 1229 (1997), and references therein.
5. F. F. Chen and R. W. Boswell, IEEE Trans. Plasma Sci. 25, 1245 (1997), and references therein.
6. S. Shinohara, J. Plasma Fusion Res. 78, 5 (2002), and references therein (mostly in Japanese).
7. F. R. Chang-Díaz, Trans. Fusion Technol. 35, 87 (1999).
8. S. Shinohara and T. Tanikawa, Rev. Sci. Instrum. 75, 1941 (2004).
9. S. Shinohara and T. Tanikawa, Phys. Plasmas 12, 044502 (2005).
10. B. P. Cluggish, Phys. Plasmas 12, 057101 (2005).
11. M. Nisoa, Y. Sakawa, and T. Shoji, Jpn. J. Appl. Phys., Part 2 38, L777 (1999).
12. K. Toki, S. Shinohara, T. Tanikawa, and K. P. Shamrai, Thin Solid Films (in press).
13. Y. Sakawa, H. Kunimatsu, H. Kikuchi, and T. Shoji, Phys. Plasmas 11, 286 (2004).
14. M. J. Hanna and C. Watts, Phys. Plasmas 8, 4251 (2001).
15. W. Gekkelman, H. Pfister, Z. Lucky, J. Bamber, D. Leneman, and J. M. Maggs, Rev. Sci. Instrum. 62, 2875 (1991).
16. P. Zhu and R. W. Boswell, Phys. Rev. Lett. 63, 2805 (1989).
17. P. Zhu and R. W. Boswell, Phys. Fluids B 3, 869 (1991).
18. M. Light, F. F. Chen, and P. K. Colestock, Phys. Plasmas 8, 4675 (2001).
19. Y. Sakawa, T. Takino, and T. Shoji, Phys. Plasmas 6, 4759 (1999).
20. S. Shinohara, N. Kaneda, and Y. Kawai, Thin Solid Films 316, 139 (1998).
21. J. Hopwood, Plasma Sources Sci. Technol. 1, 109 (1992).
22. A. R. Ellingboe and R. W. Boswell, Phys. Plasmas 3, 2797 (1996).
23. S. Shinohara and K. Yonekura, Plasma Phys. Controlled Fusion 42, 41 (2000).
24. M. Nisoa, Y. Sakawa, and T. Shoji, Jpn. J. Appl. Phys., Part 2 38, L777 (1999).
25. T. Tanikawa and S. Shinohara, Proceedings of the International Congress on Plasma Physics, (International Advisory Committee, Nice, 2004) (http://hal.ccsd.cnrs.fr/ccsd-00002013).
26. T. Tanikawa, S. Shinohara, and K. Toki, Proceedings of the 56th International Astronautical Congress (International Astronautical Federation, Fukuoka, 2005), Paper IAC-05-C4.4.05.
27. T. Tanikawa and S. Shinohara, Thin Solid Films (in press).
28. S. M. Yun, J. H. Kim, and H. Y. Chang, J. Vac. Sci. Technol. A 15, 673 (1997).
29. S. M. Yun and H. Y. Chang, Phys. Lett. A 248, 400 (1998).