Propagating wave characteristics for plasma production in plasma processing field

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 36, Issue 7 SUPPL. B, 1997, Pages 4695-4703

  Shinohara, Shunjiro ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

Diagnostics; Electron cyclotron wave; Helicon wave; Plasma processing; Plasma production; Propagating wave; Surface wave; Wave character

Indexed keywords

PLASMA DIAGNOSTICS; PLASMA HEATING; PLASMA WAVES; POLARIZATION; SURFACE WAVES; WAVE PROPAGATION;

HELICON WAVES;

PLASMA APPLICATIONS;

EID: 0031176421     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.36.4695     Document Type: Article

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