Effects of antenna wavenumber spectrum and metal end plate on plasma characteristics excited by helicon wave

Thin Solid Films

Volumn 316, Issue 1-2, 1998, Pages 139-147

  Shinohara, Shunjiro ^a   Kaneda, Naoya ^a   Kawai, Yoshinobu ^a  

^a KYUSHU UNIVERSITY   (Japan)

Author keywords

End plate; Helicon wave; Inductively coupled plasma; Wavenumber spectrum

Indexed keywords

ELECTROMAGNETIC DISPERSION; HELICONS; PLASMA DENSITY;

ANTENNA WAVENUMBER SPECTRUM; INDUCTIVELY COUPLED PLASMA; METAL END PLATES;

PLASMA SOURCES;

EID: 0032024363     PISSN: 00406090     EISSN: None     Source Type: Journal    
DOI: 10.1016/S0040-6090(98)00404-0     Document Type: Article

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