Compact high-density plasma source produced by using standing helicon waves

Japanese Journal of Applied Physics, Part 2: Letters

Volumn 38, Issue 7 A, 1999, Pages

  Nisoa, Mudtorlep ^a   Sakawa, Youichi ^a   Shoji, Tatsuo ^a  

^a NAGOYA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRIC DISCHARGES; HELICONS; MAGNETIC FIELD EFFECTS; PLASMA DENSITY;

COMPACT HIGH DENSITY PLASMA SOURCES; PLASMA PRODUCTION; STANDING HELICON WAVES (SHW);

PLASMA SOURCES;

EID: 0032594936     PISSN: 00214922     EISSN: None     Source Type: Journal    
DOI: 10.1143/jjap.38.l777     Document Type: Article

References (21)