Development of very large helicon plasma source

Review of Scientific Instruments

Volumn 75, Issue 6, 2004, Pages 1941-1946

  Shinohara, Shunjiro ^a   Tanikawa, Takao ^b  

^a KYUSHU UNIVERSITY   (Japan)

^b TOKAI UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

ANTENNA RADIATION; ANTENNAS; CARRIER CONCENTRATION; CONSTRAINT THEORY; DIFFUSION; GLASS; HELICONS; MAGNETIC FIELD EFFECTS; MAGNETOPLASMA; PLASMA DENSITY; QUARTZ;

HELICON PLASMA SOURCES; HELICON WAVES; QUARTZ-GLASS WINDOW; VACUUM CHAMBER;

PLASMA SOURCES;

EID: 3042775131     PISSN: 00346748     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.1753089     Document Type: Article

References (23)

1. R. W. Boswell, Phys. Lett. 33A, 457 (1970).
2. M. A. Lieberman and A. J. Lichtenberg, Principles of Plasma Discharges and Materials Processing (Wiley, New York, 1994).
3. S. Shinohara, Jpn. J. Appl. Phys., Part 1 36, 4695 (1997), and references therein.
4. R. W. Boswell and F. F. Chen, IEEE Trans. Plasma Sci. 25, 1229 (1997), and references therein.
5. F. F. Chen and R. W. Boswell, IEEE Trans. Plasma Sci. 25, 1245 (1997), and references therein.
6. S. Shinohara, J. Plasma Fusion Res. 78, 5 (2002), and references therein [mostly in Japanese].
7. F. R. Chang-Diáz, Res. Status Variable Specific Impulse Magnetoplasma Rocket 35, 87 (1999).
8. S. Shinohara, S. Takechi, and Y. Kawai, Jpn. J. Appl. Phys., Part 1 35, 4503 (1996).
9. S. Shinohara, S. Takechi, N. Kaneda, and Y. Kawai, Plasma Phys. Controlled Fusion 39, 1479 (1997).
10. J. Hopwood, Plasma Sources Sci. Technol. 1, 109 (1992).
11. J. E. Stevens, M. J. Sowa, and J. L. Cecchi, J. Vac. Sci. Technol. A 13, 2476 (1995).
12. C. Watts, 43rd Annual Meetings of the Division of Plasma Physics, Long Beach, CA, 2000, Vol. 46, p. 32.
13. C. M. Franck, O. Grulke, and T. Klinger, Phys. Plasmas 9, 3254 (2002).
14. C. M. Franck, O. Grulke, and T. Klinger, Phys. Plasmas 10, 323 (2003).
15. J. George, M. Burin, G. Tynan, and Seok-Min Yun, the 42nd Annual Meetings of the Division of Plasma Physics and the 10th International Congress on Plasma Phys., Quebec City, 2000, Vol. 45, p. 337.
16. J. Scharer, A. Degeling, G. Borg, and R. Boswell, Phys. Plasmas 9, 3734 (2002).
17. J. Hana and C. Watts, Phys. Plasmas 8, 4251 (2001).
18. M. Krämer, B. Lorenz, and B. Clarenbach, Plasma Sources Sci. Technol. 11, A120 (2002).
19. P. A. Keiter, E. E. Scime, and M. Balkey, Phys. Plasmas 4, 2741 (1997).
20. M. W. Balkey, R. Boivin, J. L. Kline, and E. E. Scime, Plasma Sources Sci. Technol. 10, 284 (2001).
21. C. Watts, J. Allen, S. Hawkes, A. Searl, and S. B. Spores, the 44th Annual Meetings of the Division of Plasma Physics, Orlando, FL, 2002, Vol. 47, p. 32.
22. C. M. Franck and T. Klinger, the 43rd Annual Meetings of the Division of Plasma Physics, Long Beach, CA, 2001, Vol. 46, p. 31.
23. A. R. Ellingboe and R. W. Boswell, Phys. Plasmas 3, 2797 (1996).