Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating

Applied Optics

Volumn 45, Issue 8, 2006, Pages 1676-1679

  Kowalski, Michael P ^a   Heilmann, Ralf K ^b   Schattenburg, Mark L ^b   Chang, Chih Hao ^b   Berendse, Frederick B ^a   Hunter, William R ^c  

^a NAVAL RESEARCH LABORATORY   (United States)

^b MASSACHUSETTS INSTITUTE OF TECHNOLOGY   (United States)

^c SFA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANISOTROPY; CRYSTALLINE MATERIALS; ETCHING; MATHEMATICAL MODELS; OPTICAL RESOLVING POWER; ULTRAVIOLET RADIATION;

ANGLE OF INCIDENCE; GROOVE PROFILE; ION-ETCHED BLAZED GRATING; UNCOATED GRATINGS;

DIFFRACTION GRATINGS;

EID: 33645767716     PISSN: 1559128X     EISSN: 15394522     Source Type: Journal    
DOI: 10.1364/AO.45.001676     Document Type: Review

References (24)

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