Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating

Optics Letters

Volumn 29, Issue 24, 2004, Pages 2914-2916

  Kowalski, M P ^a   Cruddace, R G ^a   Heidemann, K F ^b   Lenke, R ^b   Kierey, H ^b   Hunter, W R ^d  

^a NAVAL RESEARCH LABORATORY   (United States)

^b CARL ZEISS SMT AG   (Germany)

^c LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^d SFA INC   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

BLAZING; EXTREME-ULTRAVIOLET (EUV); HOLOGRAPHIC GRATINGS; THIN FILM FILTERS;

DIFFRACTIVE OPTICS; HOLOGRAPHY; LASER OPTICS; MAGNETRON SPUTTERING; MONOCHROMATORS; MULTILAYERS; POLYMERS; REACTIVE ION ETCHING; REFLECTIVE COATINGS; THIN FILMS; ULTRAVIOLET RADIATION; VISCOSITY OF LIQUIDS;

DIFFRACTION GRATINGS;

EID: 10044239151     PISSN: 01469592     EISSN: 15394794     Source Type: Journal    
DOI: 10.1364/OL.29.002914     Document Type: Article

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