High efficiency multilayer-coated polymer-overcoated blazed Ion-etched holographic gratings for high resolution EUV astronomical spectroscopy

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5488, Issue PART 2, 2004, Pages 910-921

  Kowalski, M P ^a   Cruddace, R G ^a   Barbee Jr , T W ^b   Hunter, W R ^c   Heidemann, K F ^d   Nelles, B ^d   Lenke, R ^d   Kierey, H ^d  

^a NAVAL RESEARCH LABORATORY   (United States)

^b LAWRENCE LIVERMORE NATIONAL LABORATORY   (United States)

^c SFA INC   (United States)

^d CARL ZEISS SMT AG   (Germany)

Author keywords

Diffraction gratings; Extreme Ultraviolet; Ion etched; Multilayer coatings; Surface measurements

Indexed keywords

EXTREME ULTRAVIOLET; ION-ETCHED; MULTILAYER COATINGS; SURFACE MEASUREMENTS;

ASTRONOMY; COATINGS; DIFFRACTION GRATINGS; OPTICAL MULTILAYERS; POLYMERS; SENSITIVITY ANALYSIS;

HOLOGRAPHIC INTERFEROMETRY;

EID: 10044272277     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.551304     Document Type: Conference Paper

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