In-line voltage contrast inspection of ungrounded chain test structures for timely and detailed characterization of contact and via yield loss

Conference Proceedings from the International Symposium for Testing and Failure Analysis

Volumn 2005, Issue , 2005, Pages 401-406

  Patterson, Oliver D ^a   Wildman, Horatio ^a   Ache, Alex ^a   Wu, Kevin T ^b  

^a IBM   (United States)

^b KLA TENCOR CORPORATION   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

CHAIN TEST STRUCTURES; IN-LINE VC INSPECTION; VOLTAGE CONTRAST INSPECTION;

INSPECTION; MECHANISMS; TESTING; VOLTAGE CONTROL;

VOLTAGE MEASUREMENT;

EID: 33645692905     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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2. V. Liang, H. Sur, S. Bothra, "Passive Voltage Contrast Technique for Rapid In-line Characterization and Failure Isolation During Development of Deep-Submicron ASIC CMOS Technology", Proceedings of ISTFA, Nov 1998, pp. 221-225.
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